Epitaxial structure of n-face group iii nitride, active device, and gate protection device thereof

ABSTRACT

The present invention relates to an epitaxial structure of N-face group III nitride, its active device, and its gate protection device. The epitaxial structure of N-face AlGaN/GaN comprises a silicon substrate, a buffer layer (C-doped) on the silicon substrate, an i-GaN (C-doped) layer on the buffer layer (C-doped), an i-AlyGaN buffer layer on the i-GaN (C-doped) layer, an i-GaN channel layer on the i-AlyGaN buffer layer, and an i-AlxGaN layer on the i-GaN channel layer, where x=0.1˜0.3 and y=0.05˜0.75. By connecting a depletion-mode (D-mode) AlGaN/GaN high electron mobility transistor (HEMT) to the gate of a p-GaN gate enhancement-mode (E-mode) AlGaN/GaN HEMT in device design, the gate of the p-GaN gate E-mode AlGaN/GaN HEMT can be protected under any gate voltage.

FIELD OF THE INVENTION

The present invention relates generally to an epitaxial structure, and particularly to a novel epitaxial structure of N-face group III nitride series capable of blocking the electrons of buffer traps from entering the channel layer, and to the active device and the gate protection device formed by using the epitaxial structure.

BACKGROUND OF THE INVENTION

According to the prior art, the most common structures to achieve an enhancement-mode AlGaN/GaN high electron mobility transistor (E-mode AlGaN/GaN HEMT) include: 1. Ga-face p-GaN gate E-mode HEMT structure, and 2. N-face Al_(x)GaN gate E-mode HEMT structure. Nonetheless, as implied by their names, only the gate region will be p-GaN or Al_(x)GaN.

The most common fabrication method is to adopt and epitaxial structure. Etch the p-GaN outside the gate region using dry etching while maintaining the completeness of the thickness of the underlying epitaxial layer. Because if the underlying epitaxial layer is etched too much the two-dimensional electron gas (MEG) will not be formed at the interface of AlGaN/GaN of an N-face p-GaN gate E-mode HEMT structure. Thereby, using dry etching is challenging because the etching depth is hard to control and nonuniformity in thickness still occurs in every epitaxial layer of an epitaxial wafer. Besides, both this epitaxial structure and the normal D-Mode AlGaN/GaN HEMT epitaxial structure face the problems related to current collapse, such as buffer traps and surface traps, requiring further resolution.

Accordingly, to improve the above drawbacks, the present invention provides a novel epitaxial structure ofN-face group III nitride, an active device, and a gate protection device formed by using the epitaxial structure.

SUMMARY

An objective of the present invention is to provide a novel epitaxial structure of N-face group III nitride, an active device, and a gate protection device formed by using the epitaxial structure for enabling the gate of a p-GaN gate E-mode AlGaN/GaN HEMT to be protected under any gate voltage. In addition, multiple types of high-voltage and high-speed active devices can be formed on the substrate of the epitaxial structure of N-face group III nitride at the same time.

To achieve the above Objective, the present invention provides an epitaxial structure of AlGaN/GaN HEMT, which includes a gate protection device of D-mode AlGaN/GaN HEMT. The gate protection device is connected to: 1. the gate of a p-GaN gate E-mode AlGaN/GaN HEMT formed by selective epitaxial growth; or 2. the gate of a p-GaN gate E-mode AlGaN/GaN HEMT formed by dry etching. The epitaxial structure of N-face AlGaN/GaN as described above comprises a silicon substrate, a buffer layer (C-doped) on the silicon substrate, an i-GaN (C-doped) layer on the buffer layer (C-doped), an i-Al_(y)GaN buffer layer on the i-GaN (C-doped) layer, an i-GaN channel layer on the i-Al_(y)GaN buffer layer, and an i-Al_(x)GaN layer on the i-GaN channel layer, where x=0.1˜0.3 and y=0.05˜0.75.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 shows distributions of E_(PS) and E_(PZ) in Ga-face and N-face AlGaN/GaN and GaN/InGaN systems in different stains according to the present invention;

FIG. 2 shows a schematic diagram of Ga-face and N-face GaN grown on a substrate;

FIG. 3 shows a schematic diagram of the different locations of 2DEG generated at the junctions between AlGaN and GaN due to different polarization according to the present invention;

FIG. 4A shows a band diagram of a p-GaN layer grown on the epitaxial structure of AlGaN/GaN HEMT according to the present invention;

FIG. 4B to FIG. 4D show the operations of the p-GaN gate E-mode AlGaN/GaN HEMT at a fixed Vd and varying gate voltages Vg according to the present invention;

FIG. 4E and FIG. 4F show the equivalent circuits of the source of a D-mode AlGaN/GaN HEMT connected to the gate of a p-GaN gate E-mode AlGaN/GaN HEMT.

FIG. 4G shows the voltage and current operating curves of the devices shown in the equivalent circuits in 4E and 4F;

FIG. 5A shows an epitaxial structure diagram of the Ga-face AlGaN/GaN HEMT according to the present invention;

FIG. 5B shows an epitaxial structure diagram of the improved Ga-face AlGaN/GaN HEMT according to the present invention;

FIG. 6A and FIG. 6B show cross-sectional views of the SEG p-GaN gate E-mode AlGaN/GaN HEMT using a D-mode AlGaN/GaN HEMT without gate dielectric layer as the gate protection device;

FIG. 7A and FIG. 7B show cross-sectional views of the inverted trapezoidal gate structure for the SEG p-GaN gate;

FIG. 7C shows a cross-sectional view after the drain and source metals corresponding to FIG. 7A and FIG. 7B are fabricated;

FIG. 7D shows a cross-sectional view of dry-etching to the high-resistivity i-GaN buffer layer (C-doped) for isolating devices;

FIG. 7E shows a cross-sectional view of adopting multiple-energy destructive ion implantation to the high-resistivity i-GaN buffer layer (C-doped) for isolating devices;

FIG. 7F and FIG. 7G show cross-sectional views of forming the gate metal and the bonding pads or interconnection metals for drain and source corresponding to FIG. 7D and FIG. 7E;

FIG. 7H and FIG. 7I show cross-sectional views of forming and patterning a passivation layer for exposing the drain and source bonding pad regions corresponding to FIG. 7F and FIG. 7G;

FIG. 7 and FIG. 7K show cross-sectional views of the D-mode AlGaN/GaN HEMT after the gate field-plate metal is fabricated corresponding to FIG. 7H and FIG. 7I;

FIG. 7L shows a top view of the SEG p-GaN gate E-mode AGaN/GaN HEMT using a D-mode AlGaN/GaN HEMT without gate dielectric layer as the gate protection device;

FIG. 8A and FIG. 8B show cross-sectional views of the etched p-GaN gate E-mode AlGaN/GaN HEMT using a D-mode AlGaN/GaN HEMT without gate dielectric layer as the gate protection device;

FIG. 9A and FIG. 9B show cross-sectional views of fabricating the gate structure for the etched p-GaN gate;

FIG. 9C to FIG. 9K show cross-sectional views of fabricating the etched p-GaN gate E-mode AlGaN/GaN HEMT using a D-mode AlGaN/GaN HEMT without gate dielectric layer as the gate protection device;

FIG. 9L shows a top view of the etched p-GaN gate E-mode AlGaN/GaN HEMT using a D-mode AlGaN/GaN HEMT without gate dielectric layer as the gate protection device;

FIG. 10A and FIG. 10B show cross-sectional views of the SEG p-GaN gate and self-aligned gate metal E-mode AlGaN/GaN HEMT using a D-mode AlGaN/GaN HEMT without gate dielectric layer as the gate protection device;

FIG. 11A shows a cross-sectional views after implanting n-type silicon dopants below the drain and source using multiple ion implantation;

FIG. 11B and FIG. 11C show cross-sectional views for fabricating the SEG p-GaN gate and self-aligned gate metal;

FIG. 11D shows a cross-sectional view after the drain and source metals corresponding to FIG. 11B-2 are fabricated;

FIG. 11E shows a cross-sectional view of dry-etching to the high-resistivity i-GaN buffer layer (C-doped) for isolating devices;

FIG. 11F shows a cross-sectional view of adopting multiple-energy destructive ion implantation to the high-resistivity i-GaN buffer layer (C-doped) for isolating devices;

FIG. 11G and FIG. 11H show cross-sectional views of forming the gate metal and the bonding pads or interconnection metals for drain and source corresponding to FIG. 11E and FIG. 11F;

FIG. 11I and FIG. 11J show cross-sectional views of forming and patterning a passivation layer for exposing the drain and source bonding pad regions corresponding to FIG. 11G and FIG. 11H;

FIG. 11K and FIG. 11L show cross-sectional views of the D-mode AGaN/GaN HEMT after the gate field-plate metal is fabricated corresponding to FIG. 11I and FIG. 11J;

FIG. 11M shows a top view of the SEG p-GaN gate and self-aligned gate metal E-mode AlGaN/GaN HEMT using a D-mode AlGaN/GaN HEMT without gate dielectric layer as the gate protection device;

FIG. 12A and FIG. 12B show cross-sectional views of the SEG p-GaN gate E-mode AlGaN/GaN HEMT using a D-mode AlGaN/GaN HEMT with gate dielectric layer as the gate protection device;

FIG. 13 shows a top view corresponding to FIG. 12A and FIG. 12B;

FIG. 14A and FIG. 14B show cross-sectional views of the etched p-GaN gate E-mode AlGaN/GaN HEMT using a D-mode AlGaN/GaN HEMT with gate dielectric layer as the gate protection device;

FIG. 15 shows a top view corresponding to FIG. 14A and FIG. 14B;

FIG. 16A to FIG. 16B show cross-sectional views of the SEG p-GaN gate and self-aligned gate metal E-mode AlGaN/GaN HEMT using a D-mode AlGaN/GaN HEMT with gate dielectric layer as the gate protection device;

FIG. 17 shows a top view corresponding to FIG. 16A and FIG. 16B;

FIG. 18A shows an equivalent circuit of the source of a D-mode AlGaN/GaN HEMT without gate dielectric layer connecting to a p-GaN gate E-mode AlGaN/GaN HEMT and cascoding to a D-mode AlGaN/GaN HEMT without gate dielectric layer;

FIG. 18B shows an equivalent circuit of the source of a D-mode AlGaN/GaN HEMT without gate dielectric layer connecting to a p-GaN gate E-mode AlGaN/GaN HEMT and cascoding to a D-mode AlGaN/GaN HEMT with gate dielectric layer;

FIG. 18C shows an equivalent circuit of the source of a D-mode AlGaN/GaN HEMT with gate dielectric layer connecting to a p-GaN gate E-mode AlGaN/GaN HEMT and cascoding to a D-mode AlGaN/GaN HEMT without gate dielectric layer;

FIG. 18D shows an equivalent circuit of the source of a D-mode AlGaN/GaN HEMT with gate dielectric layer connecting to a p-GaN gate E-mode AlGaN/GaN HEMT and cascoding to a D-mode AlGaN/GaN HEMT with gate dielectric layer;

19A and FIG. 19B show cross-sectional views of the SEG p-GaN gate E-mode AlGaN/GaN HEMT using a D-mode AlGaN/GaN HEMT without gate dielectric layer as the gate protection device cascoding to a D-mode AlGaN/GaN HEMT without gate dielectric layer;

FIG. 20A and FIG. 20B show cross-sectional views of the inverted trapezoidal gate structure for the SEG p-GaN gate;

FIG. 20C shows a cross-sectional view after the drain and source metals corresponding to FIG. 20A and FIG. 20B are fabricated;

FIG. 20D shows a cross-sectional view of dry-etching to the high-resistivity i-GaN buffer layer (C-doped) for isolating devices;

FIG. 20E shows a cross-sectional view of adopting multiple-energy destructive ion implantation to the high-resistivity i-GaN buffer layer (C-doped) for isolating devices;

FIG. 20F and FIG. 20G show cross-sectional views of forming the gate metal and the bonding pads or interconnection metals for drain and source corresponding to FIG. 20D and FIG. 20E;

FIG. 20H and FIG. 20I show cross-sectional views of forming and patterning a passivation layer for exposing the drain and source bonding pad regions corresponding to FIG. 20F and FIG. 20G;

FIG. 20J and FIG. 20K show cross-sectional views after the gate field-plate metal is fabricated corresponding to FIG. 20H and FIG. 20I;

FIG. 20L shows a top view corresponding to FIG. 20A and FIG. 20B;

FIG. 21A and FIG. 21B show cross-sectional views of the SEG p-GaN gate E-mode AlGaN/GaN HEMT using a D-mode AlGaN/GaN HEMT without gate dielectric layer as the gate protection device cascoding to a D-mode AGaN/GaN HEMT with gate dielectric layer;

FIG. 22A shows a cross-sectional view of dry-etching to the high-resistivity i-GaN buffer layer (C-doped) for isolating devices and forming the inverted trapezoidal gate structure for the SEG p-GaN gate and the drain and source metals;

FIG. 22B shows a cross-sectional view of adopting multple-energy destructive ion implantation to the high-resistivity i-GaN buffer layer (C-doped) for isolating devices and forming the inverted trapezoidal gate structure for the SEG p-GaN gate and the drain and source metals;

FIG. 20C and FIG. 20D show cross-sectional views of forming the gate metal and the bonding pads or interconnection metals for drain and source corresponding to FIG. 22A and FIG. 22B;

FIG. 22D and FIG. 22E show cross-sectional views of forming and patterning a passivation layer for exposing the drain and source bonding pad regions corresponding to FIG. 20C and FIG. 20D

FIG. 22I and FIG. 22H show cross-sectional views after the gate field-plate metal is fabricated corresponding to FIG. 22D and FIG. 22E;

FIG. 22I shows a top view corresponding to FIG. 21A and FIG. 21B;

FIG. 23A and FIG. 23B show cross-sectional views of the hybrid E-mode AlGaN/GaN HEMT formed by the etched p-GaN gate E-mode AGaN/GaN HEMT using a D-mode AlGaN/GaN HEMT without gate dielectric layer as the gate protection device cascoding to a D-mode AlGaN/GaN HEMT without gate dielectric layer;

FIG. 24A shows a cross-sectional view of the SEG region with photoresist;

FIG. 24B shows a cross-sectional view after the etched p-GaN gate is fabricated in the SEG region;

FIG. 24C shows a cross-sectional view after the drain and source metals corresponding to FIG. 24B are fabricated;

FIG. 24D shows a cross-sectional view of dry-etching to the high-resistivity i-GaN buffer layer (C-doped) for isolating devices;

FIG. 24E shows a cross-sectional view of adopting multiple-energy destructive ion implantation to the high-resistivity i-GaN buffer layer (C-doped) for isolating devices;

FIG. 24F and FIG. 24G show cross-sectional views of forming the gate metal and the bonding pads or interconnection metals for drain and source corresponding to FIG. 24D and FIG. 24E;

FIG. 24H and FIG. 24I show cross-sectional views of forming and patterning a passivation layer for exposing the drain and source bonding pad regions corresponding to FIG. 24F and FIG. 24G;

FIG. 24J and FIG. 24K show cross-sectional views after the gate field-plate metal is fabricated corresponding to FIG. 24H and FIG. 24I;

FIG. 24L shows a top view corresponding to FIG. 23A and FIG. 23B;

FIG. 25A and FIG. 25B show cross-sectional views of the etched p-GaN gate E-mode AlGaN/GaN HEMT using a D-mode AlGaN/GaN HEMT without gate dielectric layer as the gate protection device cascoding to a D-mode AGaN/GaN HEMT with gate dielectric layer;

FIG. 26A shows a cross-sectional view of dry-etching to the high-resistivity i-GaN buffer layer (C-doped) for isolating devices and forming the inverted trapezoidal gate structure for the SEG p-GaN gate and the drain and source metals;

FIG. 26B shows a cross-sectional view of adopting multiple-energy destructive ion implantation to the high-resistivity i-GaN buffer layer (C-doped) for isolating devices and forming the inverted trapezoidal gate structure for the SEG p-GaN gate and the drain and source metals;

FIG. 26C and FIG. 26D show cross-sectional views of forming the gate metal and the bonding pads or interconnection metals for drain and source corresponding to FIG. 26A and FIG. 26B;

FIG. 26E and FIG. 26F show cross-sectional views of forming and patterning a passivation layer for exposing the drain and source bonding pad regions corresponding to FIG. 26C and FIG. 26D;

FIG. 26G and FIG. 26H show cross-sectional views after the gate field-plate metal is fabricated corresponding to FIG. 26E and FIG. 26F;

FIG. 26I shows a top view corresponding to FIG. 25A and FIG. 25B;

FIG. 27A and FIG. 27B show cross-sectional views of the SEG p-GaN gate and self-aligned gate metal E-mode AlGaN/GaN HEMT using a D-mode AlGaN/GaN HEMT without gate dielectric layer as the gate protection device cascoding to a D-mode AlGaN/GaN HEMT without gate dielectric layer;

FIG. 28A shows a cross-sectional view of the source and drain ion implantation regions;

FIG. 28B shows a cross-sectional view of defining the SEG p-GaN gate region and the self-aligned gate metal region;

FIG. 28C shows a cross-sectional view of the inverted trapezoidal gate structure for the SEG p-GaN gate;

FIG. 28D shows a cross-sectional view after the drain and source metals corresponding to FIG. 27A and FIG. 27B are fabricated FIG. 28E shows a cross-sectional view of dry-etching to the high-resistivity i-GaN buffer layer (C-doped) for isolating devices and forming the inverted trapezoidal gate structure for the SEG p-GaN gate and the drain and source metals;

FIG. 28F shows a cross-sectional view of adopting multiple-energy destructive ion implantation to the high-resistivity i-GaN buffer layer (C-doped) for isolating devices and forming the inverted trapezoidal gate structure for the SEG p-GaN gate and the drain and source metals;

FIG. 28G and FIG. 28H show cross-sectional views of forming the gate metal and the bonding pads or interconnection metals for drain and source corresponding to FIG. 28E and FIG. 28F;

FIG. 28I and FIG. 28J show cross-sectional views of forming and patterning a passivation layer for exposing the drain and source bonding pad regions corresponding to FIG. 28G and FIG. 28H;

FIG. 28K and FIG. 28L show cross-sectional views after the gate field-plate metal is fabricated corresponding to FIG. 28I and FIG. 28J;

FIG. 28L shows a top view corresponding to FIG. 27A and FIG. 27B;

FIG. 29A and FIG. 29B show cross-sectional views of the SEG p-GaN gate and self-aligned gate metal E-mode AlGaN/GaN HEMT using a D-mode AlGaN/GaN HEMT without gate dielectric layer as the gate protection device cascoding to a D-mode AlGaN/GaN HEMT with gate dielectric layer,

FIG. 30A shows a cross-sectional view of dry-etching to the high-resistivity i-GaN buffer layer (C-doped) for isolating devices and forming the inverted trapezoidal gate structure for the SEG p-GaN gate and the drain and source metals;

FIG. 30B shows a cross-sectional view of adopting multiple-energy destructive ion implantation to the high-resistivity i-GaN buffer layer (C-doped) for isolating devices and forming the inverted trapezoidal gate structure for the SEG p-GaN gate and the drain and source metals;

FIG. 30C and FIG. 30D show cross-sectional views of forming the gate metal and the bonding pads or interconnection metals for drain and source corresponding to FIG. 26A and FIG. 26B;

FIG. 30E and FIG. 30F show cross-sectional views of forming and patterning a passivation layer for exposing the drain and source bonding pad regions corresponding to FIG. 30C and FIG. 30D;

FIG. 30G and FIG. 30H show cross-sectional views after the gate field-plate metal is fabricated corresponding to FIG. 30E and FIG. 30F;

FIG. 30I shows a top view corresponding to 29A and FIG. 29B;

FIG. 31A and FIG. 31B show cross-sectional views of the SEG p-GaN gate E-mode AlGaN/GaN HEMT using a D-mode AlGaN/GaN HEMT with gate dielectric layer as the gate protection device cascoding to a D-mode AGaN/GaN HEMT without gate dielectric layer;

FIG. 32 shows a top view corresponding to FIG. 31A and FIG. 31B;

FIG. 33A and FIG. 33B show cross-sectional views of the SEG p-GaN gate E-mode AlGaN/GaN HEMT using a D-mode AlGaN/GaN HEMT with gate dielectric layer as the gate protection device cascoding to a D-mode AlGaN/GaN HEMT with gate dielectric layer;

FIG. 34 shows a top view corresponding to FIG. 33A and FIG. 33B;

FIG. 35A and FIG. 35B show cross-sectional views of the etched p-GaN gate E-mode AlGaN/GaN HEMT using a D-mode AlGaN/GaN HEMT with gate dielectric layer as the gate protection device cascoding to a D-mode AGaN/GaN HEMT without gate dielectric layer;

FIG. 36 shows a top view corresponding to FIG. 35A and FIG. 35B;

FIG. 37A and FIG. 37B show cross-sectional views of the etched p-GaN gate E-mode AlGaN/GaN HEMT using a D-mode AlGaN/GaN HEMT with gate dielectric layer as the gate protection device cascoding to a D-mode AlGaN/GaN HEMT with gate dielectric layer;

FIG. 38 shows a top view corresponding to FIG. 37A and FIG. 37B;

FIG. 39A and FIG. 39B show cross-sectional views of the SEG p-GaN gate and self-aligned gate metal E-mode AlGaN/GaN HEMT using a D-mode AlGaN/GaN HEMT with gate dielectric layer as the gate protection device cascoding to a D-mode AlGaN/GaN HEMT without gate dielectric layer;

FIG. 40 shows a top view corresponding to FIG. 39A and FIG. 39B;

FIG. 41A and FIG. 41B show cross-sectional views of the SEG p-GaN gate and self-aligned gate metal E-mode AlGaN/GaN HEMT using a D-mode AlGaN/GaN HEMT with gate dielectric layer as the gate protection device cascoding to a D-mode AlGaN/GaN HEMT with gate dielectric layer; and

FIG. 42 shows a top view corresponding to Fig. FIG. 41A and FIG. 41B.

DETAILED DESCRIPTION

FIG. 1 shows distributions of E_(PS) and E_(PZ) in Ga-face and N-face AGaN/GaN and GaN/InGaN systems in different stains according to the present invention, where E_(PS) is the spontaneous polarization (the polarization of the material) while E_(PZ) is the piezoelectric polarization (the polarization formed by the piezoelectric effect of strain). Thereby, E_(PS) is determined by the epitaxial layers while E_(PZ) is determined by the piezoelectric effect of strain.

In the AlGaN/GaN system, the value of E_(PZ) is negative when AlGaN is under tensile strain and is positive when AlGaN is under compressive strain. Contrarily, in the GaN/InGaN system, the signs for the values of E_(PZ) are opposite. In addition, according to Reference 121, it is known that, firstly, in the AlGaN/GaN system, the polarization is determined by E_(SP), and secondly, in the GaN/InGaN system, the polarization is determined by E_(PZ).

As shown in FIG. 2, P is spontaneous polarization and E is the corresponding electric field. In GaN, the Ga-face (N-face) polarization is determined when the Ga atom (N atom) layer of the Ga—N dual-layer faces the surface of epitaxy. As shown in the figure, a schematic diagram of Ga-face and N-face GaN grown on a substrate is illustrated. If it is Ga-face polarization, the internal electric field is away from the substrate and pointing to the surface. Thereby, the polarization is opposite to the direction of the internal electric field. Consequently, the polarization will cause negative charges to accumulate on the surface of lattice and positive charges to accumulate at the junction with the substrate. On the contrary, if it is N-face polarization, the locations of charge accumulation are swapped and the direction of internal electric field is opposite.

For an AlGaN/GaN HEMT, the most important thing is how the Ga- and N-face polarization influence the device characteristics. FIG. 3 shows a schematic diagram of the different locations of 2DEG generated at the junctions between AlGaN and GaN due to different polarization. In the Ga-face structure, 2DEG exists at the AGaN/GaN interface while in the N-face structure, 2DEG exists at the GaN/AlGaN interface. The existence of 2DEG indicates accumulation of positive polarization charges at the interface and the 2DEG itself is just the accumulation of free electrons for compensating the polarization charges.

As shown in FIG. 4A to FIG. 4D, the principle of p-GaN gate E-mode AlGaN/GaN HEMT can be viewed from two perspectives. First, by viewing from the polarization electric field, after a p-GaN layer is grown on the epitaxial structure of AlGaN/GaN HEMT, this p-GaN layer will generate a polarization electric field to deplete the 2DEG in the i-GaN channel layer. Secondly, by viewing from the energy band, as shown in FIG. 4A, after a p-GaN layer is grown on the epitaxial structure of AlGaN/GaN HEMT, this p-GaN layer will raise the energy band of the barrier layer i-AlGaN. Thereby, the original potential well at the i-AGaN/i-GaN junction will be raised above the Fermi energy level, and hence disabling 2DEG from forming.

As shown in FIG. 4B, as the voltage of the p-type gate G is less than or equal to 0, the 2DEG below is completely depleted. Thereby, the current from the drain D cannot pass the channel to reach the source S. As shown in FIG. 4C, as the voltage of the p-type gate G is greater than 0, the potential well at the i-AlGaN/i-GaN junction is suppressed below the Fermi energy level. Thereby, electrons will refill the potential well below and forming 2DEG. When the 2DEG is recovered completely, this positive voltage is defined as the threshold voltage Vth. At this moment, the channel is turned on again and the current from the drain D can pass the channel to reach the source S.

In addition, as shown in the equivalent circuit diagram of FIG. 4D, the gate G of the p-GaN gate E-mode AlGaN/GaN HEMT versus the drain D and the gate G versus the source S can be viewed as two SBDs connected back-to-back. Thereby, when Vgs is greater than VF, the SBD between the gate G and the drain D will be turned on. At this time, the holes (positive charges) from the p-GaN gate will be injected into the 2DEG. Consequently, to maintain electrical neutrality of the channel layer, the number of electrons in the channel will be increased, leading to an increase of the concentration of the 2DEG. At this moment, to enable electrons to compensate the injected holes rapidly for maintaining electrical neutrality of the channel layer, the electron mobility will be increased. Once the electron mobility is increased, the drain current will be increased accordingly, resulting in an increase in the operating current of the whole device.

Besides, because the hole mobility is lower than at least a half of the electron mobility, holes will be confined and accumulated in the channel below the gate G. Thereby, the leakage current of the gate G can be reduced effectively. The gate G electrode, which is an electrode formed by Ni/Au, Pt/Au, Mo, TiN for forming Schottky contacts, of the p-GaN gate HEMT contacts the p-GaN directly and holes will be confined and accumulated in the channel below the gate G. Unfortunately, when Vgs is much greater than VF, the conduction current of the SBD between the gate G and the drain D is so large that holes cannot be confined and accumulated in the channel below the gate G. Massive holes will be injected into the channel layer and making the gate leakage current increase rapidly. Hence, the transistor can no longer operate in the desired condition. Accordingly, the limited value of Vgs is always the shortcoming of a p-GaN gate E-mode AlGaN/GaN HEMT. In general, due to different epitaxy and process conditions, Vgs(max) is around 5-10V. Since the gate trigger voltage of a commercial power control IC is 9-18V, the gate of the p-GaN gate E-mode AlGaN/GaN HEMT will be punched through directly by the massive gate leakage current Ig generated by the gate trigger voltage and leading to malfunction of the p-GaN gate E-mode AlGaN/GaN HEMT.

To solve the above problem, as shown in the equivalent circuits in FIGS. 4E and 4F, the source of a D-mode AlGaN/GaN HEMT is connected to the gate of a p-GaN E-mode AlGaN/GaN HEMT. The source and the gate of the D-mode AlGaN/GaN HEMT M1 are connected electrically using a fabrication method. In other words, the gate G and the source S are shorted (Vgs=0V). Then the D-mode AlGaN/GaN HEMT M1 with Vgs=0V acts as the gate protection device for the p-GaN E-mode AlGaN/GaN HEMT M2.

FIG. 4G corresponds to the operating principle and steps of the devices in FIG. 4E. First (Step 1), the p-GaN E-mode AlGaN/GaN HEMT M2 must be operated in the condition of Vgs>Vf because only in this condition, there is sufficient Ig (the p-GaN gate leakage current) to turn on the D-mode AGaN/GaN HEMT M1 at Vgs=0V. Thereby, the Ids of the D-mode AlGaN/GaN HEMT M1 will start to rise (Step 2). When the Ids of the D-mode AlGaN/GaN HEMT M1 has risen to the saturation current Idsat (Step 3), the Ig of the p-GaN E-mode AlGaN/GaN HEMT M2 will be fixed to Ig(M2)=Idsat(M1). Thereby, the Vgs of the p-GaN E-mode AGaN/GaN HEMT M2 will be locked to the Vgs when Ig(M2)=Idsat(M1). When the Vin of the D-mode AlGaN/GaN HEMT M1 continues to increase (Step 4), since the Vgs of the p-GaN E-mode AlGaN/GaN HEMT M2 is locked, Vin=Vds(M1)+Vgs(M2). Thereby, the p-GaN E-mode AlGaN/GaN HEMT M2 will be protected.

FIG. 5A shows an epitaxial structure diagram of the Ga-face AlGaN/GaN HEMT according to the present invention. This epitaxial structure comprises, in order, a silicon substrate 11, a buffer layer (C-doped) 12, an i-GaN layer (C-doped) 13, an i-Al_(y)GaN buffer layer 14, an i-GaN channel layer 15, and an i-Al_(x)GaN layer 16. The buffer layer (C-doped) 12 is disposed on the silicon substrate 11. This epitaxial structure includes the i-Al_(y)GaN buffer layer 14, which is mainly used for blocking the electrons of the buffer traps from entering the channel layer and thus avoiding current collapse of the device. FIG. 5B shows another epitaxial structure diagram of the Ga-face AlGaN/GaN HEMT according to the present invention. To avoid the lattice mismatch problem if the i-Al_(y)GaN buffer layer 14 is grown directly on the i-GaN layer (C-doped) 13 as shown in FIG. 5A, an i-Al_(z)GaN grading buffer layer 17 is added.

As shown in FIG. 6A and FIG. 6B, thanks to the region of p-type GaN (the inverted trapezoidal gate structure 26), the 2DEG below the region will be depleted. Finally, the stress generated by the passivation layer will invert the polarity of the active region (i-Al_(x)GaN/i-GaN/i-Al_(y)GaN) from N-face polarity to Ga-face polarity. This is why the 2DEG after fabrication is located in the i-GaN channel layer at the junction of the i-Al_(x)GaN/i-GaN, since the original N-face polarity has been inverted to Ga-face polarity. The present invention uses the D-mode N-face AlGaN/GaN HEMT with polarity inversion M1 at Vgs=0V as the gate protection device for the p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion M2. Thereby, a selective epitaxial growth (SEG) p-GaN gate is formed on the epitaxial structure according to the present invention for forming an SEG p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion. The p-type GaN inverted trapezoidal gate structure 26 is a gate structure. Alternatively, after a p-type epitaxial layer is grown on the epitaxial structure according to the present invention, the dry etching method is adopted to etch and form the p-GaN gate (etched p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion). Accordingly, there are two types of p-GaN gate E-mode AlGaN/GaN HEMT, including the SEG p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion and the etched p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion.

Embodiment 1: An SEG p-GaN Gate E-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion Using a D-Mode N-Face AGaN/GaN with Polarity Inversion and without Gate Dielectric Layer as the Gate Protection Device

As shown in FIG. 6A and FIG. 6B, the characteristics of the SEG p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion using a D-mode N-face AlGaN/GaN with polarity inversion and without gate dielectric layer as the gate protection device according to the present invention include the epitaxial structure of N-face AlGaN/GaN designed according to the present invention and a p-GaN inverted trapezoidal gate structure 26 located on a first i-Al_(x)GaN layer. Although the 2DEG is formed at the junction i-Al_(x)GaN/i-GaN of the i-GaN channel layer 15, due to the existence of the p-GaN inverted trapezoidal gate structure 26, the 2DEG below the p-GaN inverted trapezoidal gate structure 26 in the i-GaN channel layer 15 will be depleted. FIG. 6A and FIG. 6B are schematic diagrams after device fabrication using different device isolation processes. In FIG. 6A, dry etching to the highly resistive i-GaN buffer layer (C-doped) can be adopted for isolating devices. In FIG. 6B, multiple-energy destructive ion implantation is adopted. In general, heavy atoms such as boron or oxygen atoms are used for isolating devices.

The SEG p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion using a D-mode N-face AlGaN/GaN with polarity inversion and without gate dielectric layer as the gate protection device according to the present invention comprises the epitaxial structure of N-face AlGaN/GaN with polarity inversion designed according to the present invention and is divided into a left region and a right region. In the left region, a D-mode N-face AlGaN/GaN HEMT with polarity inversion and without gate dielectric layer M1 is formed. In the right region, an SEG p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion M2 is formed. This SEG p-GaN gate E-mode N-face AGaN/GaN HEMT with polarity inversion M2 includes a p-GaN inverted trapezoidal gate structure 26. In addition, although the 2DEG is formed at the junction i-Al_(x)GaN/i-GaN of the i-GaN channel layer 15, due to the existence of the p-GaN inverted trapezoidal gate structure 26, the 2DEG below the p-GaN inverted trapezoidal gate structure 26 in the i-GaN channel layer 15 will be depleted, giving a depletion region 262.

In the following, the fabrication method for the present embodiment will be described. Nonetheless, a person having ordinary skill in the art should know that the present embodiment and its metal layout is not limited to the fabrication method.

Step S11: Pattern the silicon dioxide mask layer 20. First, as shown in FIG. 7A, deposit a silicon dioxide mask layer 20 on the epitaxial structure of Ga-face AlGaN/GaN according to the present invention using plasma-enhanced chemical vapor deposition (PECVD) with a thickness of around 100-200 nm. Next, define the gate SEG region 24 by using photoresist and exposure method. Finally, the silicon dioxide mask layer 20 in the region 24 is etched by a wet etching method using buffered oxide etchant (BOE) to expose the surface of the epitaxy. Then, the photoresist 22 is stripped using stripper. Because the wet etching is isotropic, in addition to etching downward, lateral etching will occur concurrently. Thereby, the opening of the silicon dioxide mask layer 20 in the region 24 will form an inverted trapezoidal structure.

Step S12: Form the p-GaN inverted trapezoidal gate structure 26 using SEG. First, p-GaN SEG is performed using metal-organic chemical vapor deposition (MOCVD) and only the exposed surface of the epitaxy can grow p-GaN. Because the growth of p-GaN in MOCVD is also isotropic, in addition to growing upward, lateral growth will occur concurrently and thus forming an inverted trapezoidal structure of p-GaN, which is just the p-GaN inverted trapezoidal gate structure 26. Finally, the silicon dioxide mask layer 20 is etched by a wet etching method using BOE and forming the structure shown in FIG. 7B.

Then, because the p-GaN SEG region 24 occupies only a small portion of the whole epitaxy wafer, the loading effect will occur easily. Namely, the growth rate on the defined region for p-GaN is three to four times the growth rate on the general surface. Thereby, the p-type doping concentration in p-GaN will be equal to ⅓ to ¼ of the expected.

Step S13: Form the drain ohmic contact 30 and the source ohmic contact 28. A metal layer, for example, a general Ti/Al/Ti/Au or Ti/Al/Ni/Au metal layer, is deposited on the epitaxy wafer using metal vapor deposition. Then a metal lift-off method is adopted to pattern the deposited metal layer for forming the drain and source electrodes on the epitaxy wafer. Afterwards, a thermal treatment is performed at 700-900° C. for 30 seconds to make the drain and source electrodes become ohmic contacts 30, 28, as shown in FIG. 7C.

Step S14: Perform device isolation process. In this step, multiple-energy destructive ion implantation is adopted. In general, heavy atoms such as boron or oxygen atoms are used for isolating devices, as shown in FIG. 7G. Alternatively, dry etching to the highly resistive i-GaN buffer layer (C-doped) can be adopted for isolating devices, as shown in FIG. 7F.

Step S15: Perform the metal wiring process. In this step, metal deposition is performed. Metal vapor deposition and lift-off methods are used for patterning the Ni/Au metal layer and forming bonding pads for the gate, drain, and source electrodes as well as the interconnection metal layer 36. Alternatively, in this step, the gate bonding pad region connected electrically with the gate electrode can be formed concurrently, as the structures shown in FIG. 7G.

Step S16: Deposit and pattern the passivation layer. As shown in FIG. 7H and FIG. 7I, a passivation layer 40 is grown by PECVD. The material is selected from the group consisting of SiO_(x), SiO_(x)N_(y), or SiN_(x); the thickness is greater than 1000 Å. By taking advantage of the stress generated by the passivation layer 40, the polarity of the active region (i-Al_(x)GaN layer 16/i-GaN channel layer 15/i-Al_(y)GaN buffer layer 14) can be inverted from N-face to Ga-face, and hence the 2DEG 6 can be moved from the i-GaN channel layer 15/i-Al_(y)GaN buffer layer 14 interface of the i-GaN channel layer 15 to the i-Al_(x)GaN layer 16/i-GaN channel layer 15 interface of the i-GaN channel layer 15. Finally, the passivation layer 40 is patterned for exposing the bonding pad region. For example, wet etching using BOE is adopted for exposing the drain and source bonding pad regions 42, 43 for subsequent wire bonding.

Because p-GaN is an inverted trapezoidal structure, a sloped capacitor will be formed at the dashed circle in FIG. 7J and FIG. 7K. This capacitor will induce the field plate effect having the main function of distributing the high-density electric field below the gate electrode. In addition to increasing the breakdown voltage Vds between the drain and the source of the HEMT, it also suppresses the electron trapping effect below the gate electrode and hence reducing current collapse during the operation of the HEMT.

Step S17: Fabricate the gate field-plate metal. The metal vapor deposition and metal left-off methods are adopted to form the gate field-plate metal 62 for the D-mode HEMT, as shown in the final structures in FIG. 7J and FIG. 7K.

Embodiment 2: An Etched p-GaN Gate E-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion Using a D-Mode N-Face AlGaN/GaN with Polarity Inversion and without Gate Dielectric Layer as the Gate Protection Device

FIG. 8A and FIG. 8B are schematic diagrams after device fabrication using different device isolation processes. In FIG. 8B, multiple-energy destructive ion implantation is adopted. In general, heavy atoms such as boron or oxygen atoms are used for isolating devices. In FIG. 8A, dry etching to the highly resistive i-GaN buffer layer (C-doped) can be adopted for isolating devices.

As shown in FIG. 8A and FIG. 8B, the etched p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion using a D-mode AlGaN/GaN with polarity inversion and without gate dielectric layer as the gate protection device according to the present invention comprises the epitaxial structure and is divided into a left region and a right region. In the left region, a D-mode N-face AlGaN/GaN HEMT with polarity inversion and without gate dielectric layer M1 is formed. In the right region, an SEG p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion M2 is formed. This SEG p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion M2 includes an etched p-GaN gate structure 26A. In addition, although the 2DEG is formed at the junction i-Al_(x)GaN/i-GaN of the i-GaN channel layer 15, due to the existence of the etched p-GaN gate structure 26A, the 2DEG below the etched p-GaN gate structure 26A in the i-GaN channel layer 15 will be depleted, giving a depletion region 262.

Step S21: Fabricate the etched p-GaN gate. First, as shown in FIG. 9A, a p-GaN layer is grown on the Ga-face AGaN/GaN epitaxial structure according to the present invention using MOCVD. Next, define the p-GaN gate region by using photoresist 22 and exposure method. Finally, dry etching is adopted to etch the p-GaN outside the region to the AlGaN blocking layer of the Ga-face AlGaN/GaN epitaxial structure according to the present invention. Then, the photoresist 22 is stripped using stripper. Thereby, the etched p-GaN gate is fabricated.

According to Embodiment 2, since the process steps as shown in FIG. 9A to FIG. 9F are identical to those according to Embodiment 1, the details will not be repeated.

Embodiment 3: An SEG p-GaN Gate and Self-Aligned Gate Metal E-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion Using a D-Mode N-Face AlGaN/GaN with

Polarity Inversion and without Gate Dielectric Layer as the Gate Protection Device FIG. 10A and FIG. 10B are schematic diagrams after device fabrication using different device isolation processes. In FIG. 10B, multiple-energy destructive ion implantation is adopted. In general, heavy atoms such as boron or oxygen atoms are used for isolating devices. In FIG. 10A, dry etching to the highly resistive i-GaN buffer layer (C-doped) can be adopted for isolating devices.

As shown in FIG. 8A and FIG. 8B, the SEG p-GaN gate and self-aligned gate metal E-mode N-face AlGaN/GaN HEMT with polarity inversion using a D-mode N-face AlGaN/GaN with polarity inversion and without gate dielectric layer as the gate protection device according to the present invention comprises the epitaxial structure of N-face AlGaN/GaN designed according to the present invention and is divided into a left region and a right region. In the left region, a D-mode N-face AlGaN/GaN HEMT without gate dielectric layer M1 is formed. In the right region, an SEG p-GaN gate and self-aligned gate metal E-mode N-face AlGaN/GaN HEMT with polarity inversion M2 is formed. As shown in the FIG. 10A and FIG. 10B, the transistor M2 according to the present embodiment comprises the epitaxial structure of N-face AlGaN/GaN. A p-GaN inverted trapezoidal gate structure 26, a first source metal layer 28, and a first drain metal layer 30 are formed on the i-Al_(x)GaN layer of the epitaxial structure. In addition, although the 2DEG is formed at the junction i-Al_(x)GaN/i-GaN of the i-GaN channel layer, due to the existence of the p-GaN inverted trapezoidal gate structure 26, the 2DEG below the p-GaN inverted trapezoidal gate structure 26 in the i-GaN channel layer will be depleted and forming a depletion region 262. The i-Al_(x)GaN layer of the epitaxial structure includes a first source ion implantation region 101 and a first drain ion implantation region 102. Besides, the first source ion implantation region 101 is located below the first source metal layer 28, while the first drain ion implantation region 102 is located below the first drain metal layer 30. Moreover, a first gate metal layer 103 is disposed on the p-GaN inverted trapezoidal gate structure 26.

A thermal treatment at 700□˜900□ is required for the drain and source electrodes to form ohmic contacts with i-Al_(x)GaN. In a general HEMT fabrication process, the gate metal is fabricated after the thermal treatment for the drain and source electrodes. Thereby, the Schottky contact between the gate metal and the i-Al_(x)GaN will not be damaged due to this high-temperature thermal treatment.

Nonetheless, for the SEG p-GaN gate and self-aligned gate metal HEMT, the gate metal is fabricated prior to the drain and source electrodes. In order to prevent damages on the characteristics of the Schottky contact formed by the gate and the i-Al_(x)GaN by the thermal treatment, multiple ion implantation is adopted to implant n-type silicon dopants below the drain and source electrodes. Thereby, the drain and source can form ohmic contacts with the i-Al_(x)GaN without the 700□˜900□ thermal treatment.

Step 31: As shown in FIG. 11A, use the multiple ion implantation to implant n-type silicon dopants below the drain and source electrodes and activate by thermal treatment to form a first source ion implantation region 101 and a first drain ion implantation region 102. The ion implantation is shallow and concentration distribution of ions implanted into the i-Al_(x)GaN is Gaussian. We expect the peak value of the Gaussian distribution is as close to the surface of the i-Al_(x)GaN as possible, as shown in FIG. 19A and FIG. 19B. First, use PECVD to deposit a layer of SiO₂ mask 105 as a buffer layer. Thereby, in ion implantation, the peak value of the Gaussian distribution is close to the surface of the i-Al_(x)GaN. Next, use photolithography to form a patterned photoresist layer 104 and define the ion implantation regions below the drain and source electrodes. Then, the multiple ion implantation is adopted to implant n-type silicon dopants below the drain and source electrodes. Afterwards, remove the patterned photoresist layer 104 and the SiO₂ mask 105.

Afterwards, a thermal treatment at a temperature greater than 600□ is performed for activating the n-type silicon dopants and forming the first source ion implantation region 101 and the first drain ion implantation region 102. This thermal treatment can be performed after the step S71. In other words, after the steps of ion implantation and removal of the patterned photoresist layer 104 and the SiO₂ mask 105, thermal treatment at a temperature greater than 600□ is performed for activation. Alternatively, in the subsequent SEG p-GaN gate using MOCVD, the high temperature for growth can be used for activation.

Step S32: Please refer to FIG. 11B as well. Define the SEG p-GaN gate and self-aligned gate metal region. Deposit a silicon dioxide mask layer 20 using PECVD with a thickness greater than 2500 nm. Next, define the gate SEG region by using photoresist and exposure method. Finally, the silicon dioxide mask layer 20 in the region is etched by a wet etching method using BOE to expose the surface of the epitaxy. Then, the photoresist is stripped using stripper. Because the wet etching is isotropic, in addition to etching downward, lateral etching will occur concurrently. Thereby, the opening of the silicon dioxide mask layer 20 will form an inverted-trapezoidal-structure opening 24.

Step S33: Form the SEG p-GaN gate and self-aligned gate metal. First, p-GaN SEG is performed using MOCVD and only the exposed surface of the epitaxy can grow p-GaN. Because the growth of p-GaN in MOCVD is also isotropic, in addition to growing upward, lateral growth will occur concurrently and thus forming an inverted trapezoidal structure of p-GaN, which is just the p-GaN inverted trapezoidal structure 26. Afterwards, gate electrode is coated using metal coating. Finally, the silicon dioxide mask layer is etched by a wet etching method and the metal outside the gate electrode region is lift off, forming the self-aligned gate metal 102 on the p-GaN inverted trapezoidal structure 26, as the structure shown in FIG. 11B.

Step S34: Use metal vapor deposition and lift-off methods to form drain and source electrodes 28, 30, as shown in FIG. 11D.

Step S35: Perform device isolation process. As shown in FIG. 11D, multiple-energy destructive ion implantation is adopted. Alternatively, dry etching to the highly resistive i-GaN buffer layer (C-doped) can be adopted for isolating devices.

Step S36: Perform the metal wiring process. Metal vapor deposition and lift-off methods are used for forming the metal layer 36 and forming bonding pads for the drain, and source electrodes as well as the metal interconnection, as shown in FIG. 11E.

Step S37: Pattern the passivation layer. A passivation layer 40 is grown by PECVD. The material is selected from the group consisting of SiO_(x), SiO_(x)N_(y), or SiN_(x); the thickness is greater than 1000 Å. By taking advantage of the stress generated by the passivation layer 40, the polarity of the active region (i-Al_(x)GaN layer 16/i-GaN channel layer 15/i-Al_(y)GaN buffer layer 14) can be inverted from N-face to Ga-face, and hence the 2DEG 6 can be moved from the i-GaN channel layer 15/i-Al_(y)GaN buffer layer 14 interface of the i-GaN channel layer 15 to the i-Al_(x)GaN layer 16/i-GaN channel layer 15 interface of the i-GaN channel layer 15. Finally, the passivation layer 40 is patterned for exposing a portion of the metal layer 36, as shown in FIG. 11I and FIG. 11J. For example, etching is adopted for exposing the bonding pad region for subsequent wire bonding.

Because p-GaN is an inverted trapezoidal gate structure 26, as shown in FIG. 11 and FIG. 11J, a sloped capacitor will be formed at the dashed circle. This capacitor will induce the field plate effect having the main function of distributing the high-density electric field below the gate electrode. In addition to increasing the breakdown voltage Vds between the drain and the source of the HEMT, it also suppresses the electron trapping effect below the gate electrode and hence reducing current collapse during the operation of the HEMT Step S38: Fabricate the gate field-plate metal. The metal vapor deposition and metal left-off methods are adopted to form the gate field-plate metal 62 for the D-mode HEMT, as shown in the final structures in FIG. 11G.

The major difference between the SEG p-GaN gate and self-aligned gate metal E-mode N-face AlGaN/GaN HEMT with polarity inversion and the SEG p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion described in the previous embodiment is the contact area ratio of the gate metal to the SEG p-GaN gate. According to the principle of the previous embodiment, when Vgs is much greater than VF, the conduction current of the SBD between the gate G and the drain D is so large that holes cannot be confined and accumulated in the channel below the gate G. Massive holes will be injected into the channel layer and making the gate leakage current increase rapidly. Hence, the transistor can no longer operate in the desired condition. Accordingly, the limited value of Vgs is always the shortcoming of a p-GaN gate E-mode AlGaN/GaN HEMT. Fortunately, the contact area ratio of the SEG p-GaN gate and self-aligned gate metal E-mode N-face AlGaN/GaN HEMT with polarity inversion to the SEG p-GaN gate is much larger than the one according to the previous embodiment (completely covered p-GaN gate). Thereby, when Vgs is greater than VF, the injected holes by the gate is more uniform. The electric field distribution is more uniform as well. Accordingly, Vgs max (self-aligned gate metal) is greater than Vgs max.

The following Embodiment 4, Embodiment 5, and Embodiment 6 correspond to Embodiment 1, Embodiment 2, and Embodiment 3, respectively. The difference is that a D-mode AlGaN/GaN HEMT with gate dielectric layer is used as the gate protection device, as shown in the equivalent circuit in FIG. 4F. The difference between a D-mode HEMT without and with the gate dielectric layer 72 is that the pinch-off voltage Vp of a D-mode HEMT without the gate dielectric layer 72 will be smaller than that of one with the gate dielectric layer 72. The advantage of a higher pinch-off voltage Vp is that the voltage to enter the saturation region is larger. As shown in the equivalent circuit, in the saturation region, the device becomes a variable resistor with high resistance. Accordingly, the total accumulated resistance for a higher pinch-off voltage Vp is smaller, leading to lower power consumption.

Embodiment 4: An SEG p-GaN Gate E-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion Using a D-Mode N-Face AlGaN/GaN with Polarity Inversion and with Gate Dielectric Layer as the Gate Protection Device

As shown in FIG. 12A and FIG. 12B, the characteristics of the SEG p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion using a D-mode N-face AlGaN/GaN with polarity inversion and with gate dielectric layer as the gate protection device according to the present invention include the epitaxial structure of N-face AlGaN/GaN designed according to the present invention and a p-GaN inverted trapezoidal gate structure 26 located on a first i-Al_(x)GaN layer. Although the 2DEG is formed at the junction i-Al_(x)GaN/i-GaN of the i-GaN channel layer 15, due to the existence of the p-GaN inverted trapezoidal gate structure 26, the 2DEG below the p-GaN inverted trapezoidal gate structure 26 in the i-GaN channel layer 15 will be depleted. FIG. 12A and FIG. 12B are schematic diagrams after device fabrication using different device isolation processes. In FIG. 12B, multiple-energy destructive ion implantation is adopted. In general, heavy atoms such as boron or oxygen atoms are used for isolating devices. In FIG. 12A, dry etching to the highly resistive i-GaN buffer layer (C-doped) can be adopted for isolating devices.

The SEG p-GaN gate E-mode N-face AGaN/GaN HEMT with polarity inversion using a D-mode N-face AlGaN/GaN HEMT with polarity inversion and with gate dielectric layer as the gate protection device according to the present invention comprises the epitaxial structure of N-face AGaN/GaN designed according to the present invention and is divided into a left region and a right region. In the left region, a D-mode N-face AlGaN/GaN HEMT with polarity inversion and with gate dielectric layer M1 is formed. In the right region, an SEG p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion M2 is formed. This SEG p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion M2 includes a p-GaN inverted trapezoidal gate structure 26. In addition, although the 2DEG is formed at the junction i-Al_(x)GaN/i-GaN of the i-GaN channel layer 15, due to the existence of the p-GaN inverted trapezoidal gate structure 26, the 2DEG below the p-GaN inverted trapezoidal gate structure 26 in the i-GaN channel layer 15 will be depleted, giving a depletion region 262 without 2DEG.

The process steps as shown in FIG. 7A to FIG. 7F according to Embodiment 4 are identical to those according to Embodiment 1. The only difference is that between the steps of FIG. 7C and FIG. 7D, a step is added for fabricating the gate dielectric layer of the D-mode N-face AlGaN/GaN HEMT with polarity inversion and with gate dielectric layer M1 in the left region.

Embodiment 5: An Etched p-GaN Gate E-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion Using a D-Mode N-Face AlGaN/GaN with Polarity Inversion and with Gate Dielectric Layer as the Gate Protection Device

FIG. 14A and FIG. 14B are schematic diagrams after device fabrication using different device isolation processes. In FIG. 14B, multiple-energy destructive ion implantation is adopted. In general, heavy atoms such as boron or oxygen atoms are used for isolating devices. In FIG. 14A, dry etching to the highly resistive i-GaN buffer layer (C-doped) can be adopted for isolating devices.

As shown in FIG. 14A and FIG. 14B, the SEG p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion using a D-mode AlGaN/GaN HEMT with gate dielectric layer as the gate protection device according to the present invention comprises the epitaxial structure and is divided into a left region and a right region. In the left region, a D-mode N-face AGaN/GaN HEMT with polarity inversion and with gate dielectric layer M1 is formed. In the right region, an SEG p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion M2 is formed. This SEG p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion M2 includes an etched p-GaN gate structure 26A. In addition, although the 2DEG is formed at the junction i-Al_(x)GaN/i-GaN of the i-GaN channel layer 15, due to the existence of the etched p-GaN gate structure 26A, the 2DEG below the etched p-GaN gate structure 26A in the i-GaN channel layer 15 will be depleted, giving a depletion region 262 without 2DEG.

Step S51: Fabricate the etched p-GaN gate. First, as shown in FIG. 9A, a p-GaN layer is grown on the N-face AlGaN/GaN epitaxial structure according to the present invention using MOCVD. Next, define the p-GaN gate region by using photoresist 22 and exposure method. Finally, dry etching is adopted to etch the p-GaN outside the region to the AlGaN blocking layer of the N-face AGaN/GaN epitaxial structure according to the present invention. Then, the photoresist 22 is stripped using stripper. Thereby, the etched p-GaN gate structure 26A is fabricated.

The process steps as shown in FIG. 9A to FIG. 9F according to Embodiment 5 are identical to those according to Embodiment 2. The only difference is that between the steps of FIG. 9C and FIG. 9D, a step is added for fabricating the gate dielectric layer of the D-mode N-face AlGaN/GaN HEMT with polarity inversion and with gate dielectric layer M1 in the left region.

Embodiment 6: An SEG p-GaN Gate and Self-Aligned Gate Metal E-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion Using a D-Mode N-Face AlGaN/GaN with Polarity Inversion and with Gate Dielectric Layer as the Gate Protection Device

FIG. 16A and FIG. 16B are schematic diagrams after device fabrication using different device isolation processes. In FIG. 16B, multiple-energy destructive ion implantation is adopted. In general, heavy atoms such as boron or oxygen atoms are used for isolating devices. In FIG. 16A, dry etching to the highly resistive i-GaN buffer layer (C-doped) can be adopted for isolating devices.

As shown in FIG. 16A and FIG. 16B, the SEG p-GaN gate and self-aligned gate metal E-mode N-face AlGaN/GaN HEMT with polarity inversion using a D-mode N-face AlGaN/GaN HEMT with polarity inversion and with gate dielectric layer as the gate protection device according to the present invention comprises the epitaxial structure of N-face AlGaN/GaN designed according to the present invention and is divided into a left region and a right region. In the left region, a D-mode N-face AlGaN/GaN HEMT with polarity inversion and with gate dielectric layer M1 is formed. In the right region, an SEG p-GaN gate and self-aligned gate metal E-mode N-face AlGaN/GaN HEMT with polarity inversion M2 is formed. As shown in the FIG. 16A and FIG. 16B, the transistor M2 according to the present embodiment comprises the epitaxial structure of N-face AlGaN/GaN. A p-GaN inverted trapezoidal gate structure 26, a first source metal layer 28, and a first drain metal layer 30 are formed on the i-Al_(x)GaN layer of the epitaxial structure. In addition, although the 2DEG is formed at the junction i-Al_(x)GaN/i-GaN of the i-GaN channel layer, due to the existence of the p-GaN inverted trapezoidal gate structure 26, the 2DEG below the p-GaN inverted trapezoidal gate structure 26 in the i-GaN channel layer will be depleted. The i-Al_(x)GaN layer of the epitaxial structure includes a first source ion implantation region 101 and a first drain ion implantation region 102. Besides, the first source ion implantation region 101 is located below the first source metal layer 28, while the first drain ion implantation region 102 is located below the first drain metal layer 30. Moreover, a first gate metal layer 103 is disposed on the p-GaN inverted trapezoidal gate structure 26.

The process steps as shown in FIG. 11A to FIG. 11G according to Embodiment 6 are identical to those according to Embodiment 2. The only difference is that between the steps of FIG. 9D and FIG. 9E, a step is added for fabricating the gate dielectric layer of the D-mode N-face AlGaN/GaN HEMT with polarity inversion and with gate dielectric layer M1 in the left region.

As shown in FIG. 18A and FIG. 18B, which show equivalent circuits of the source of a D-mode N-face AlGaN/GaN HEMT with polarity inversion and without gate dielectric layer connecting to a p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion and cascoding to a D-mode N-face AGaN/GaN HEMT with polarity inversion and (1) without gate dielectric layer and (2) with gate dielectric layer. The source and the gate of the D-mode N-face AlGaN/GaN HEMT with polarity inversion and without gate dielectric layer M are connected electrically using a fabrication method. In other words, the gate and the source are shorted (Vgs=V). Then the D-mode N-face AlGaN/GaN HEMT with polarity inversion M1 with Vgs=0V acts as the gate protection device for the p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion M2. The drain of M2 and the source of M3 are connected electrically. M3 is a D-mode AlGaN/GaN HEMT (1) without gate dielectric layer or (2) with the gate dielectric layer 72. Besides, the gate of M3 and the source of M2 are connected electrically for enabling a greater off-state breakdown voltage at Vin=0V (off-state) for the hybrid device of M1+M2+M3. Since M3 is a D-mode AlGaN/GaN HEMT, the off-state breakdown voltage of M3 is greater than the off-state breakdown voltage of M2.

As shown in FIG. 18C and FIG. 18D, which show equivalent circuits of the source of a D-mode N-face AlGaN/GaN HEMT with polarity inversion and with gate dielectric layer connecting to a p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion and cascoding to a D-mode N-face AlGaN/GaN HEMT with polarity inversion and (1) without gate dielectric layer and (2) with gate dielectric layer. The source and the gate of the D-mode N-face AlGaN/GaN HEMT with polarity inversion and without gate dielectric layer M1 are connected electrically using a fabrication method. In other words, the gate and the source are shorted (Vgs=0V). Then the D-mode N-face AlGaN/GaN HEMT with polarity inversion M1 with Vgs=0V acts as the gate protection device for the p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion M2. The drain of M2 and the source of M3 are connected electrically. M3 is a D-mode AlGaN/GaN HEMT (1) without gate dielectric layer or (2) with the gate dielectric layer 72. Besides, the gate of M3 and the source of M2 are connected electrically.

Embodiment 7: As Shown in FIG. 19A and FIG. 19B, a Hybrid E-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion Formed by the SEG p-GaN Gate E-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion Using a D-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion and without Gate Dielectric Layer as the Gate Protection Device Cascoding to a D-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion and without Gate Dielectric Layer

A p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion usually exhibits slight Early effect, which means that the channel cannot be shut off completely and thus leading to increases of the current Ids as Vds increases when the device is operated in the saturation region with the gate voltage Vg fixed. The cascode D-mode N-face AlGaN/GaN HEMT with polarity inversion according to the present invention just can solve this problem.

As shown in FIG. 19A and FIG. 19B, the hybrid E-mode N-face AlGaN/GaN HEMT with polarity inversion according to Embodiment 7 comprises the epitaxial structure of N-face AlGaN/GaN designed according to the present invention and is divided into a left region, a middle region, and a right region. In the left region, a D-mode N-face AlGaN/GaN HEMT with polarity inversion and without gate dielectric layer M1 is formed. In the middle region, an SEG p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion M2 is formed. This SEG p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion M2 includes a p-GaN inverted trapezoidal gate structure 26. In addition, although the 2DEG is formed at the junction i-Al_(x)GaN/i-GaN of the i-GaN channel layer 15, due to the existence of the p-GaN inverted trapezoidal gate structure 26, the 2DEG below the p-GaN inverted trapezoidal gate structure 26 in the i-GaN channel layer 15 will be depleted, giving a depletion region 262 without 2DEG. In the right region, a D-mode N-face AlGaN/GaN HEMT with polarity inversion and without gate dielectric layer M3 is formed.

The process for fabricating Embodiment 7 will be described as follows. First, as shown in FIG. 20A and FIG. 20B, an epitaxial structure of N-face AlGaN/GaN according to the present invention is provided. The left region is set to fabricate the D-mode N-face AlGaN/GaN HEMT with polarity inversion and without gate dielectric layer. The middle region is set to fabricate the SEG p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion. The right region is set to fabricate the D-mode N-face AlGaN/GaN HEMT with polarity inversion and without gate dielectric layer. Next, as described in the previous fabrication method, form a patterned silicon dioxide mask layer 20 having an inverted-trapezoidal-structure opening 24 on the epitaxial structure of N-face AGaN/GaN for defining the region for the SEG gate. The thickness of this silicon dioxide mask layer 20 is around 100 to 200 nm. Then, p-GaN is grown in the inverted-trapezoidal-structure opening 24 and forming a p-GaN inverted trapezoidal structure 26. Afterwards, the patterned silicon dioxide mask layer 20 is removed. Then, as described above, because the p-GaN SEG region occupies only a small portion of the whole epitaxy wafer, the p-type doping concentration in p-GaN will be equal to ⅓ to ¼ of the expected.

Then, use metal vapor deposition and metal lift-off methods to form the drain and source electrodes. Afterwards, a thermal treatment is performed at 700-900° C. for 30 seconds to make the drain and source electrodes become ohmic contacts 30, 28, as shown in FIG. 20B.

Next, use destructive ion implantation as shown in FIG. 20C-2 or the dry etching to the highly resistive i-GaN buffer layer (C-doped) as shown in FIG. 20C-1 to isolate devices.

Metal vapor deposition and lift-off methods are used for patterning the Ni/Au metal layer and forming bonding pads for the gate, drain, and source electrodes as well as the interconnection metal layer 36. Alternatively, in this step, the gate bonding pad region connected electrically with the gate electrode can be formed concurrently, as the structures shown in FIG. 20D.

A passivation layer 40 is grown by PECVD. The material is selected from the group consisting of SiO_(x), SiO_(x)N_(y), or SiN_(x); the thickness is greater than 1000 Å. By taking advantage of the stress generated by the passivation layer 40, the polarity of the active region (i-Al_(x)GaN layer 16/i-GaN channel layer 15/i-Al_(y)GaN buffer layer 14) can be inverted from N-face to Ga-face, and hence the 2DEG 6 can be moved from the i-GaN channel layer 15/i-Al_(y)GaN buffer layer 14 interface of the i-GaN channel layer 15 to the i-Al_(x)GaN layer 16/i-GaN channel layer 15 interface of the i-GaN channel layer 15. Finally, the passivation layer 40 is patterned for etching and exposing the bonding pad region and the region above the gate metal of the D-mode AlGaN/GaN HEMT without gate dielectric layer in the left region, and thus forming the structure shown in FIG. 20E.

Likewise, because p-GaN gate is an inverted trapezoidal structure, a sloped capacitor will be formed in the filed plate region 264 at the dashed circle in the figures. This capacitor will induce the field plate effect having the main function of distributing the high-density electric field below the gate electrode. In addition to increasing the breakdown voltage Vds between the drain and the source of the HEMT, it also suppresses the electron trapping effect below the gate electrode and hence reducing current collapse during the operation of the HEMT.

Finally, the metal vapor deposition and metal left-off methods are adopted to form the gate field-plate metal 62 of M1 in the left region and M3 in the right region, both M1, M3 are D-mode N-face AlGaN/GaN HEMT with polarity inversion and without gate dielectric layer, as shown in the final structure in FIG. 20F.

Embodiment 8: As Shown in FIG. 21A and FIG. 21B, a Hybrid E-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion Formed by the SEG p-GaN Gate E-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion Using a D-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion and without Gate Dielectric Layer as the Gate Protection Device Cascoding to a D-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion and with Gate Dielectric Layer

As shown in FIG. 21A and FIG. 21B, the hybrid E-mode N-face AlGaN/GaN HEMT with polarity inversion according to Embodiment 8 comprises the epitaxial structure of N-face AlGaN/GaN designed according to the present invention and is divided into a left region, a middle region, and a right region. In the left region, a D-mode N-face AlGaN/GaN HEMT with polarity inversion and without gate dielectric layer M1 is formed. In the middle region, an SEG p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion M2 is formed. This SEG p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion M2 includes a p-GaN inverted trapezoidal gate structure 26. In addition, although the 2DEG is formed at the junction i-Al_(x)GaN/i-GaN of the i-GaN channel layer 15, due to the existence of the p-GaN inverted trapezoidal gate structure 26, the 2DEG below the p-GaN inverted trapezoidal gate structure 26 in the i-GaN channel layer 15 will be depleted, giving a depletion region 262 without 2DEG. In the right region, a D-mode N-face AlGaN/GaN HEMT with polarity inversion and with gate dielectric layer M3 is formed.

Step S84: The gate dielectric layer for the D-mode N-face AGaN/GaN HEMT with polarity inversion and with gate dielectric layer M3 in the right region is fabricated. A dielectric layer is deposited by PECVD. The material is selected form the group consisting of SiO_(x), SiO_(x)N_(y), or SiN_(x); the thickness is 10 to 100 nm. Then, define the region of the gate dielectric layer 72 for the D-mode N-face AlGaN/GaN HEMT with polarity inversion by using photoresist and exposure method. Finally, the dielectric layer outside the region is etched by a wet etching method using BOE; the dielectric layer in the region of the gate dielectric layer 72 is reserved. Afterwards, the photoresist is stripped using stripper and forming the structure shown in FIG. 22A and FIG. 22B.

Step S85: Use metal vapor deposition (normally Ni/Au) and metal lift-off methods to form the gate electrode, the bonding pad regions for the drain and source electrodes, and the interconnection metal layer 36, as the structures shown in FIG. 22C and FIG. 22D. In addition, in this step, the metal wiring required for device operations can be formed concurrently. For example, the gate bonding pad region connected electrically with the gate electrode can be formed concurrently. Nonetheless, the present invention is not limited to the top views of the present invention.

Step S86: A passivation layer 40 is grown by PECVD. The material is selected from the group consisting of SiO_(x), SiO_(x)N_(y), or SiN_(x); the thickness is greater than 1000 Å. By taking advantage of the stress generated by the passivation layer 40, the polarity of the active region (i-Al_(x)GaN layer 16/i-GaN channel layer 15/i-Al_(y)GaN buffer layer 14) can be inverted from N-face to Ga-face, and hence the 2DEG 6 can be moved from the i-GaN channel layer 15/i-Al_(y)GaN buffer layer 14 interface of the i-GaN channel layer 15 to the i-Al_(x)GaN layer 16/i-GaN channel layer 15 interface of the i-GaN channel layer 15. Finally, the passivation layer 40 is patterned for etching and exposing the bonding pad region and the region above the gate metal of the D-mode AlGaN/GaN HEMT without gate dielectric layer in the left region, and thus forming the structure shown in FIG. 22E and FIG. 22F.

Step S87: Finally, the metal vapor deposition and metal left-off methods are adopted to form the gate field-plate metal 62 of the D-mode N-face AlGaN/GaN HEMT with polarity inversion and without gate dielectric layer M1 in the left region, as shown in the final structure in FIG. 22G and FIG. 22H.

Embodiment 9: As Shown in FIG. 23A and FIG. 23B, a Hybrid E-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion Formed by the Etched p-GaN Gate E-Mode N-Face AGaN/GaN HEMT with Polarity Inversion Using a D-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion and without Gate Dielectric Layer as the Gate Protection Device Cascoding to a D-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion and without Gate Dielectric Layer

As shown in FIG. 23A and FIG. 23B, the hybrid E-mode N-face AlGaN/GaN HEMT with polarity inversion according to Embodiment 9 comprises the epitaxial structure of N-face AGaN/GaN designed according to the present invention and is divided into a left region, a middle region, and a right region. In the left region, a D-mode N-face AlGaN/GaN HEMT with polarity inversion and without gate dielectric layer M1 is formed. In the middle region, an SEG p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion M2 is formed. This SEG p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion M2 includes an etched p-GaN gate structure. In addition, although the 2DEG is formed at the junction i-Al_(x)GaN/i-GaN of the i-GaN channel layer 15, due to the existence of the etched p-GaN gate structure, the 2DEG below the etched p-GaN gate structure in the i-GaN channel layer 15 will be depleted, giving a depletion region 262 without 2DEG. In the right region, a D-mode N-face AlGaN/GaN HEMT with polarity inversion and without gate dielectric layer M3 is formed.

The process for fabricating Embodiment 9 will be described as follows. First, as shown in FIG. 24A and FIG. 24B, an epitaxial structure of N-face AlGaN/GaN according to the present invention is provided. The left region is set to fabricate the D-mode N-face AlGaN/GaN HEMT with polarity inversion and without gate dielectric layer. The middle region is set to fabricate the etched p-GaN gate E-mode AlGaN/GaN HEMT. The right region is set to fabricate the D-mode N-face AlGaN/GaN HEMT with polarity inversion and without gate dielectric layer.

Step S91: Fabricate the etched p-GaN gate. First, as shown in FIG. 24A and FIG. 24B, a p-GaN layer is grown on the Ga-face AlGaN/GaN epitaxial structure according to the present invention using MOCVD. Next, define the p-GaN gate region by using photoresist 22 and exposure method. Finally, dry etching is adopted to etch the p-GaN outside the region to the AGaN blocking layer of the N-face AlGaN/GaN epitaxial structure according to the present invention. Then, the photoresist 22 is stripped using stripper. Thereby, the etched p-GaN gate is fabricated.

Step S92: Use metal vapor deposition and metal lift-off methods to form the drain and source electrodes. Afterwards, a thermal treatment is performed at 700˜900° C. for 30 seconds to make the drain and source electrodes become ohmic contacts 30, 28, as shown in FIG. 24B-1 and FIG. 24B-2.

Step S93: Use destructive ion implantation as shown in FIG. 24E or the dry etching to the highly resistive i-GaN buffer layer (C-doped) as shown in FIG. 24D to isolate devices.

Step S15: Perform the metal wiring process. In this step, metal deposition is performed. Metal vapor deposition and lift-off methods are used for patterning the Ni/Au metal layer and forming bonding pads for the gate, drain, and source electrodes as well as the interconnection metal layer 36. Alternatively, in this step, the gate bonding pad region connected electrically with the gate electrode can be formed concurrently, as the structures shown in FIG. 24F and FIG. 24G.

A passivation layer 40 is grown by PECVD. The material is selected from the group consisting of SiO_(x), SiO_(x)N_(y), or SiN_(x); the thickness is greater than 1000 Å. By taking advantage of the stress generated by the passivation layer 40, the polarity of the active region (i-Al_(x)GaN layer 16/i-GaN channel layer 15/i-Al_(y)GaN buffer layer 14) can be inverted from N-face to Ga-face, and hence the 2DEG 6 can be moved from the i-GaN channel layer 15/i-Al_(y)GaN buffer layer 14 interface of the i-GaN channel layer 15 to the i-Al_(x)GaN layer 16/i-GaN channel layer 15 interface of the i-GaN channel layer 15. Finally, the passivation layer 40 is patterned for etching and exposing the bonding pad region and the region above the gate metal of the D-mode AlGaN/GaN HEMT without gate dielectric layer in the left region, and thus forming the structure shown in FIG. 24H and FIG. 24I.

Step S95: Finally, the metal vapor deposition and metal left-off methods are adopted to form the gate field-plate metal 62 of the D-mode N-face AlGaN/GaN HEMT with polarity inversion and without gate dielectric layer in the left region, as shown in the final structure in FIG. 24J and FIG. 24K.

Embodiment 10: As Shown in FIG. 25A and FIG. 25B, a Hybrid E-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion Formed by the Etched p-GaN Gate E-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion Using a D-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion and without Gate Dielectric Layer as the Gate Protection Device Cascoding to a D-Mode N-Face AGaN/GaN HEMT with Polarity Inversion and with Gate Dielectric Layer

As shown in FIG. 25A and FIG. 25B, the hybrid E-mode AGaN/GaN HEMT according to Embodiment 10 comprises the epitaxial structure of N-face AlGaN/GaN designed according to the present invention and is divided into a left region, a middle region, and a right region. In the left region, a D-mode N-face AlGaN/GaN HEMT with polarity inversion and without gate dielectric layer M1 is formed. In the middle region, an SEG p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion M2 is formed. This SEG p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion M2 includes an etched p-GaN gate structure. In addition, although the 2DEG is formed at the junction i-Al_(x)GaN/i-GaN of the i-GaN channel layer 15. due to the existence of the etched p-GaN gate structure, the 2DEG below the etched p-GaN gate structure in the i-GaN channel layer 15 will be depleted. In the right region, a D-mode N-face AlGaN/GaN HEMT with polarity inversion and with gate dielectric layer M3 is formed.

The first process steps of Embodiment 10 are identical to those shown in FIG. 24A to FIG. 24E for Embodiment 9. Hence, the details will not be repeated.

Step S104: The gate dielectric layer 72 for the D-mode AGaN/GaN HEMT with gate dielectric layer in the right region is fabricated. A dielectric layer is deposited by PECVD. The material is selected form the group consisting of SiO_(x), SiO_(x)N_(y), or SiN_(x); the thickness is 10 to 100 nm. Then, define the region of the gate dielectric layer 72 for the D-mode AGaN/GaN HEMT by using photoresist and exposure method. Finally, the dielectric layer outside the region is etched by a wet etching method using BOE; the dielectric layer in the region of the gate dielectric layer 72 is reserved. Afterwards, the photoresist is stripped using stripper and forming the structure shown in FIG. 26A and FIG. 26B.

Step S105: Use metal vapor deposition (normally Ni/Au) and metal lift-off methods to form the gate electrode, the bonding pad regions for the drain and source electrodes, and the interconnection metal layer 36, as the structures shown in FIG. 26C and FIG. 26D. In addition, in this step, the metal wiring required for device operations can be formed concurrently. For example, the gate bonding pad region connected electrically with the gate electrode can be formed concurrently. Nonetheless, the present invention is not limited to the top views of the present invention

Step S106: A passivation layer 40 is grown by PECVD. The material is selected from the group consisting of SiO_(x), SiO_(x)N_(y), or SiN_(x); the thickness is greater than 1000 Å. By taking advantage of the stress generated by the passivation layer 40, the polarity of the active region (i-Al_(x)GaN layer 16/i-GaN channel layer 15/i-Al_(y)GaN buffer layer 14) can be inverted from N-face to Ga-face, and hence the 2DEG 6 can be moved from the i-GaN channel layer 15/i-Al_(y)GaN buffer layer 14 interface of the i-GaN channel layer 15 to the i-Al_(x)GaN layer 16/i-GaN channel layer 15 interface of the i-GaN channel layer 15. Finally, the passivation layer 40 is patterned for etching and exposing the bonding pad region and the region above the gate metal of the D-mode AlGaN/GaN HEMT without gate dielectric layer in the left region, and thus forming the structure shown in FIG. 30E and FIG. 30F.

Step S107: Finally, the metal vapor deposition and metal left-off methods are adopted to form the gate field-plate metal 62 of the D-mode N-face AlGaN/GaN HEMT with polarity inversion and without gate dielectric layer M1 in the left region, as shown in the final structure in FIG. 26G and FIG. 26H.

Embodiment 11: As Shown in FIG. 27A and FIG. 27B, a Hybrid E-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion Formed by the SEG p-GaN Gate and Self-Aligned Gate Metal E-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion Using a D-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion and without Gate Dielectric Layer as the Gate Protection Device Cascoding to a D-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion and without Gate Dielectric Layer

As shown in FIG. 27A and FIG. 27B, the hybrid E-mode N-face AlGaN/GaN HEMT with polarity inversion according to Embodiment 11 comprises the epitaxial structure of N-face AlGaN/GaN designed according to the present invention and is divided into a left region, a middle region, and a right region. In the left region, a D-mode N-face AlGaN/GaN HEMT with polarity inversion and without gate dielectric layer M1 is formed. In the middle region, an SEG p-GaN gate and self-aligned gate metal E-mode N-face AGaN/GaN HEMT with polarity inversion M2 is formed. This SEG p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion M2 includes a p-GaN inverted trapezoidal gate structure 26. In addition, although the 2DEG is formed at the junction i-Al_(x)GaN/i-GaN of the i-GaN channel layer 15, due to the existence of the p-GaN inverted trapezoidal gate structure 26, the 2DEG below the p-GaN inverted trapezoidal gate structure 26 in the i-GaN channel layer 15 will be depleted, giving a depletion region 262 without 2DEG. In the right region, a D-mode N-face AlGaN/GaN HEMT with polarity inversion and without gate dielectric layer M3 is formed.

The process for fabricating Embodiment 7 will be described as follows. First, as shown in FIG. 20A and FIG. 20B, an epitaxial structure of N-face AlGaN/GaN according to the present invention is provided. The left region is set to fabricate the D-mode N-face AlGaN/GaN HEMT with polarity inversion and without gate dielectric layer M. The middle region is set to fabricate the SEG p-GaN gate and self-aligned gate metal E-mode N-face AlGaN/GaN HEMT with polarity inversion M2. The right region is set to fabricate the D-mode N-face AlGaN/GaN HEMT with polarity inversion and without gate dielectric layer M3. The transistor M2 according to the present embodiment comprises the epitaxial structure of N-face AGaN/GaN. A p-GaN inverted trapezoidal gate structure 26, a first source metal layer 28, and a first drain metal layer 30 are formed on the i-Al_(x)GaN layer of the epitaxial structure. In addition, although the 2DEG is formed at the junction i-Al_(x)GaN/i-GaN of the i-GaN channel layer, due to the existence of the p-GaN inverted trapezoidal gate structure 26, the 2DEG below the p-GaN inverted trapezoidal gate structure 26 in the i-GaN channel layer will be depleted, giving a depletion region 262. The i-Al_(x)GaN layer of the epitaxial structure includes a first source ion implantation region 101 and a first drain ion implantation region 102. Besides, the first source ion implantation region 101 is located below the first source metal layer 28, while the first drain ion implantation region 102 is located below the first drain metal layer 30. Moreover, a first gate metal layer 103 is disposed on the p-GaN inverted trapezoidal gate structure 26.

A thermal treatment at 700L-900. is required for the drain and source electrodes to form ohmic contacts with i-Al_(x)GaN. In a general HEMT fabrication process, the gate metal is fabricated after the thermal treatment for the drain and source electrodes. Thereby, the Schottky contact between the gate metal and the i-Al_(x)GaN will not be damaged due to this high-temperature thermal treatment. Nonetheless, for the SEG p-GaN gate and self-aligned gate metal HEMT, the gate metal is fabricated prior to the drain and source electrodes. In order to prevent damages on the characteristics of the Schottky contact formed by the gate and the i-Al_(x)GaN by the thermal treatment, multiple ion implantation is adopted to implant n-type silicon dopants below the drain and source electrodes. Thereby, the drain and source can form ohmic contacts with the i-Al_(x)GaN without the 700□˜900□ thermal treatment.

Step 111: As shown in FIG. 28A, use the multiple ion implantation to implant n-type silicon dopants below the drain and source electrodes and activate by thermal treatment to form a first source ion implantation region 101 and a first drain ion implantation region 102. The ion implantation is shallow and concentration distribution of ions implanted into the i-Al_(x)GaN is Gaussian. We expect the peak value of the Gaussian distribution is as close to the surface of the i-Al_(x)GaN as possible, as shown in FIG. 19A and FIG. 19B. First, use PECVD to deposit a layer of SiO₂ mask 105 as a buffer layer. Thereby, in ion implantation, the peak value of the Gaussian distribution is close to the surface of the i-Al_(x)GaN. Next, use photolithography to form a patterned photoresist layer 104 and define the ion implantation regions below the drain and source electrodes. Then, the multiple ion implantation is adopted to implant n-type silicon dopants below the drain and source electrodes. Afterwards, remove the patterned photoresist layer 104 and the SiO₂ mask 105.

Afterwards, a thermal treatment at a temperature greater than 600□ is performed for activating the n-type silicon dopants and forming the first source ion implantation region 101 and the first drain ion implantation region 102. This thermal treatment can be performed after the step S71. In other words, after the steps of ion implantation and removal of the patterned photoresist layer 104 and the SiO₂ mask 105, thermal treatment at a temperature greater than 600□ is performed for activation. Alternatively, in the subsequent SEG p-GaN gate using MOCVD, the high temperature for growth can be used for activation.

Step S112: As shown in FIG. 28B. Define the SEG p-GaN gate and self-aligned gate metal region. Deposit a silicon dioxide mask layer 20 using PECVD with a thickness greater than 2500 nm. Next, define the gate SEG region by using photoresist and exposure method. Finally, the silicon dioxide mask layer 20 in the region is etched by a wet etching method using BOE to expose the surface of the epitaxy. Then, the photoresist is stripped using stripper. Because the wet etching is isotropic, in addition to etching downward, lateral etching will occur concurrently. Thereby, the opening of the silicon dioxide mask layer 20 will form an inverted-trapezoidal-structure opening 24.

Step S113: As shown in FIG. 28C and FIG. 28D, form the SEG p-GaN gate and self-aligned gate metal. First, p-GaN SEG is performed using MOCVD and only the exposed surface of the epitaxy can grow p-GaN. Because the growth of p-GaN in MOCVD is also isotropic, in addition to growing upward, lateral growth will occur concurrently and thus forming an inverted trapezoidal structure of p-GaN, which is just the p-GaN inverted trapezoidal structure 26. Afterwards, gate electrode is coated using metal coating. Finally, the silicon dioxide mask layer is etched by a wet etching method and the metal outside the gate electrode region is lift off, forming the self-aligned gate metal 102 on the p-GaN inverted trapezoidal structure 26, as the structure shown in FIG. 28C and FIG. 28D.

Step S114: Use metal vapor deposition and lift-off methods to form drain and source electrodes 28, 30, as shown in FIG. 28E and FIG. 28F.

Step S115: Perform device isolation process. As shown in FIG. 28G and FIG. 28H, multiple-energy destructive ion implantation is adopted. Alternatively, dry etching to the highly resistive i-GaN buffer layer (C-doped) can be adopted for isolating devices.

Step S116: Perform the metal wiring process. Metal vapor deposition and lift-off methods are used for forming the metal layer 36 and forming bonding pads for the drain, and source electrodes as well as the metal interconnection, as shown in FIG. 28I and FIG. 28J.

Step S117: Pattern the passivation layer. A passivation layer 40 is grown by PECVD. The material is selected from the group consisting of SiO_(x), SiO_(x)N_(y), or SiN_(x); the thickness is greater than 1000 Å. By taking advantage of the stress generated by the passivation layer 40, the polarity of the active region (i-Al_(x)GaN layer 16/i-GaN channel layer 15/i-Al_(y)GaN buffer layer 14) can be inverted from N-face to Ga-face, and hence the 2DEG 6 can be moved from the i-GaN channel layer 15/i-Al_(y)GaN buffer layer 14 interface of the i-GaN channel layer 15 to the i-Al_(x)GaN layer 16/i-GaN channel layer 15 interface of the i-GaN channel layer 15. Finally, the passivation layer 40 is patterned for exposing a portion of the metal layer 36, as shown in FIG. 11I and FIG. 11J. For example, etching is adopted for exposing the bonding pad region for subsequent wire bonding.

Because p-GaN is an inverted trapezoidal gate structure 26, as shown in FIG. 27A and FIG. 27B, a sloped capacitor will be formed in the filed plate region 264 at the dashed circle. This capacitor will induce the field plate effect having the main function of distributing the high-density electric field below the gate electrode. In addition to increasing the breakdown voltage Vds between the drain and the source of the HEMT, it also suppresses the electron trapping effect below the gate electrode and hence reducing current collapse during the operation of the HEMT.

Step S118: Fabricate the gate field-plate metal. The metal vapor deposition and metal left-off methods are adopted to form the gate field-plate metal 62 for the D-mode HEMT, as the final structures shown in FIG. 28L.

Embodiment 12: As Shown in FIG. 29A and FIG. 29B, a Hybrid E-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion Formed by the SEG p-GaN Gate and Self-Aligned Gate Metal E-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion Using a D-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion and without Gate Dielectric Layer as the Gate Protection Device Cascoding to a D-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion and with Gate Dielectric Layer

As shown in FIG. 29A and FIG. 29B, the hybrid E-mode N-face AlGaN/GaN HEMT with polarity inversion according to Embodiment 12 comprises the epitaxial structure of N-face AlGaN/GaN designed according to the present invention and is divided into a left region, a middle region, and a right region. In the left region, a D-mode N-face AlGaN/GaN HEMT with polarity inversion and without gate dielectric layer M1 is formed. In the middle region, an SEG p-GaN gate and self-aligned gate metal E-mode N-face AGaN/GaN HEMT with polarity inversion M2 is formed. This SEG p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion M2 includes a p-GaN inverted trapezoidal gate structure 26. In addition, although the 2DEG is formed at the junction i-Al_(x)GaN/i-GaN of the i-GaN channel layer 15, due to the existence of the p-GaN inverted trapezoidal gate structure 26, the 2DEG below the p-GaN inverted trapezoidal gate structure 26 in the i-GaN channel layer 15 will be depleted, giving a depletion region 262 without 2DEG. In the right region, a D-mode N-face AlGaN/GaN HEMT with polarity inversion and with gate dielectric layer M3 is formed.

The first process steps of Embodiment 12 are identical to those shown in FIG. 28A to FIG. 28F for Embodiment 11. Hence, the details will not be repeated.

Step S124: The gate dielectric layer 72 for the D-mode N-face AlGaN/GaN HEMT with polarity inversion and with gate dielectric layer in the right region is fabricated. A dielectric layer is deposited by PECVD. The material is selected form the group consisting of SiO_(x), SiO_(x)N_(y), or SiN_(x); the thickness is 10 to 100 nm. Then, define the region of the gate dielectric layer 72 for the D-mode AlGaN/GaN HEMT by using photoresist and exposure method. Finally, the dielectric layer outside the region is etched by a wet etching method using BOE; the dielectric layer in the region of the gate dielectric layer 72 is reserved. Afterwards, the photoresist is stripped using stripper and forming the structure shown in FIG. 30A and FIG. 30B

Step S125: Use metal vapor deposition (normally Ni/Au) and metal lift-off methods to form the gate electrode, the bonding pad regions for the drain and source electrodes, and the interconnection metal layer 36, as the structures shown in FIG. 30C and FIG. 30D. In addition, in this step, the metal wiring required for device operations can be formed concurrently. For example, the gate bonding pad region connected electrically with the gate electrode can be formed concurrently. Nonetheless, the present invention is not limited to the top views of the present invention.

Step S126: A passivation layer 40 is grown by PECVD. The material is selected form the group consisting of SiO_(x), SiO_(x)N_(y), or SiN_(x). Finally, the passivation layer 40 is patterned for etching and exposing the bonding pad region and the region above the gate metal of the D-mode AlGaN/GaN HEMT without gate dielectric layer in the left region, and thus forming the structure shown in FIG. 30E and FIG. 30F.

Step S127: Finally, the metal vapor deposition and metal left-off methods are adopted to form the gate field-plate metal 62 of the D-mode N-face AlGaN/GaN HEMT with polarity inversion and without gate dielectric layer M1 in the left region, as shown in the final structure in FIG. 30G and FIG. 30H.

As shown in FIG. 18C and FIG. 15D, which show equivalent circuits of the source of a D-mode N-face AlGaN/GaN HEMT with polarity inversion and with gate dielectric layer connecting to a p-GaN gate E-mode N-face AGaN/GaN HEMT with polarity inversion and cascoding to a D-mode N-face AlGaN/GaN HEMT with polarity inversion and (1) without gate dielectric layer and (2) with gate dielectric layer. The source and the gate of the D-mode N-face AlGaN/GaN HEMT with polarity inversion and without gate dielectric layer M1 are connected electrically using a fabrication method. In other words, the gate and the source are shorted (Vgs=V). Then the D-mode N-face AlGaN/GaN HEMT with polarity inversion M1 with Vgs=0V acts as the gate protection device for the p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion M2. The drain of M2 and the source of M3 are connected electrically. M3 is a D-mode AlGaN/GaN HEMT (1) without gate dielectric layer or (2) with the gate dielectric layer 72. Besides, the gate of M3 and the source of M2 are connected electrically

Embodiment 13: As Shown in FIG. 31A and FIG. 31B, a Hybrid E-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion Formed by the SEG p-GaN Gate E-Mode N-Face AGaN/GaN HEMT with Polarity Inversion Using a D-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion and with Gate Dielectric Layer as the Gate Protection Device Cascoding to a D-Mode N-Face AGaN/GaN HEMT with Polarity Inversion and without Gate Dielectric Layer

As shown in FIG. 31A and FIG. 31B, the hybrid E-mode N-face AlGaN/GaN HEMT with polarity inversion according to Embodiment 13 comprises the epitaxial structure of N-face AlGaN/GaN designed according to the present invention and is divided into a left region, a middle region, and a right region. In the left region, a D-mode N-face AlGaN/GaN HEMT with polarity inversion and with gate dielectric layer M1 is formed. In the middle region, an SEG p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion M2 is formed. This SEG p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion M2 includes a p-GaN inverted trapezoidal gate structure 26. In addition, although the 2DEG is formed at the junction i-Al_(x)GaN/i-GaN of the i-GaN channel layer 15, due to the existence of the p-GaN inverted trapezoidal gate structure 26, the 2DEG below the p-GaN inverted trapezoidal gate structure 26 in the i-GaN channel layer 15 will be depleted, giving a depletion region 262 without 2DEG. In the right region, a D-mode N-face AlGaN/GaN HEMT with polarity inversion and without gate dielectric layer M3 is formed.

The process steps as shown in FIG. 20A to FIG. 20L according to Embodiment 13 are identical to those according to Embodiment 7. The only difference is that between the steps of FIG. 20D, FIG. 20E, FIG. 20F and FIG. 20G, a step is added for fabricating the gate dielectric layer of the D-mode N-face AlGaN/GaN HEMT with polarity inversion and with gate dielectric layer M1 in the left region.

Embodiment 14: As Shown in FIG. 33A and FIG. 33B, a Hybrid E-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion Formed by the SEG p-GaN Gate E-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion Using a D-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion and with Gate Dielectric Layer as the Gate Protection Device Cascoding to a D-Mode N-Face AGaN/GaN HEMT with Polarity Inversion and with Gate Dielectric Layer

As shown in FIG. 33A and FIG. 33B, the hybrid E-mode N-face AGaN/GaN HEMT with polarity inversion according to Embodiment 14 comprises the epitaxial structure of N-face AlGaN/GaN designed according to the present invention and is divided into a left region, a middle region, and a right region. In the left region, a D-mode N-face AlGaN/GaN HEMT with polarity inversion and with gate dielectric layer M1 is formed. In the middle region, an SEG p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion M2 is formed. This SEG p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion M2 includes a p-GaN inverted trapezoidal gate structure 26. In addition, although the 2DEG is formed at the junction i-Al_(x)GaN/i-GaN of the i-GaN channel layer 15, due to the existence of the p-GaN inverted trapezoidal gate structure 26, the 2DEG below the p-GaN inverted trapezoidal gate structure 26 in the i-GaN channel layer 15 will be depleted, giving a depletion region 262 without 2DEG. In the right region, a D-mode N-face AlGaN/GaN HEMT with polarity inversion and with gate dielectric layer M3 is formed.

The process steps as shown in FIG. 20A to FIG. 20L according to Embodiment 14 are identical to those according to Embodiment 7. The only difference is that between the steps of FIG. 20D, FIG. 20E, FIG. 20F and FIG. 20G, a step is added for fabricating the gate dielectric layer of the D-mode N-face AlGaN/GaN HEMT with polarity inversion and with gate dielectric layer M1 in the left region and the gate dielectric layer of the D-mode N-face AlGaN/GaN HEMT with polarity inversion and with gate dielectric layer M3 in the right region.

Embodiment 15: As Shown in FIG. 35A and FIG. 35B, a Hybrid E-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion Formed by the Etched p-GaN Gate E-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion Using a D-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion and with Gate Dielectric Layer as the Gate Protection Device Cascoding to a D-Mode N-Face AGaN/GaN HEMT with Polarity Inversion and without Gate Dielectric Layer

As shown in FIG. 35A and FIG. 35B, the hybrid E-mode N-face AGaN/GaN HEMT with polarity inversion according to Embodiment 15 comprises the epitaxial structure of N-face AlGaN/GaN designed according to the present invention and is divided into a left region, a middle region, and a right region. In the left region, a D-mode N-face AlGaN/GaN HEMT with polarity inversion and with gate dielectric layer M1 is formed. In the middle region, an SEG p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion M2 is formed. This SEG p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion M2 includes an etched p-GaN gate structure. In addition, although the 2DEG is formed at the junction i-Al_(x)GaN/i-GaN of the i-GaN channel layer 15, due to the existence of the etched p-GaN gate structure, the 2DEG below the etched p-GaN gate structure 26A in the i-GaN channel layer 15 will be depleted, giving a depletion region 262 without 2DEG. In the right region, a D-mode N-face AlGaN/GaN HEMT with polarity inversion and without gate dielectric layer M3 is formed.

The process steps as shown in FIG. 24A to FIG. 24K according to Embodiment 15 are identical to those according to Embodiment 9. The only difference is that between the steps of FIG. 24D and FIG. 24G, a step is added for fabricating the gate dielectric layer of the D-mode N-face AlGaN/GaN HEMT with polarity inversion and with gate dielectric layer M1 in the left region.

Embodiment 16: As Shown in FIG. 37A and FIG. 37B, a Hybrid E-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion Formed by the Etched p-GaN Gate E-Mode N-Face AGaN/GaN HEMT with Polarity Inversion Using a D-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion and with Gate Dielectric Layer as the Gate Protection Device Cascoding to a D-Mode N-Face AGaN/GaN HEMT with Polarity Inversion and with Gate Dielectric Layer

As shown in FIG. 37A and FIG. 37B, the hybrid E-mode N-face AlGaN/GaN HEMT with polarity inversion according to Embodiment 16 comprises the epitaxial structure of N-face AlGaN/GaN designed according to the present invention and is divided into a left region, a middle region, and a right region. In the left region, a D-mode N-face AlGaN/GaN HEMT with polarity inversion and with gate dielectric layer M1 is formed. In the middle region, an SEG p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion M2 is formed. This SEG p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion M2 includes an etched p-GaN gate structure. In addition, although the 2DEG is formed at the junction i-Al_(x)GaN/i-GaN of the i-GaN channel layer 15, due to the existence of the etched p-GaN gate structure, the 2DEG below the etched p-GaN gate structure 26A in the i-GaN channel layer 15 will be depleted, giving a depletion region 262 without 2DEG. In the right region, a D-mode N-face AlGaN/GaN HEMT with polarity inversion and with gate dielectric layer M3 is formed.

The process steps as shown in FIG. 24A to FIG. 24K according to Embodiment 16 are identical to those according to Embodiment 9. The only difference is that between the steps of FIG. 24D and FIG. 24G, a step is added for fabricating the gate dielectric layer of the D-mode N-face AlGaN/GaN HEMT with polarity inversion and with gate dielectric layer M1 in the left region and the gate dielectric layer of the D-mode N-face AlGaN/GaN HEMT with polarity inversion and with gate dielectric layer M3 in the right region.

Embodiment 17: As Shown in FIG. 39A and FIG. 39B, a Hybrid E-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion Formed by the SEG p-GaN Gate and Self-Aligned Gate Metal E-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion Using a D-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion and with Gate Dielectric Layer as the Gate Protection Device Cascoding to a D-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion and without Gate Dielectric Layer

As shown in FIG. 39A and FIG. 39B, the hybrid E-mode N-face AlGaN/GaN HEMT with polarity inversion according to Embodiment 17 comprises the epitaxial structure of N-face AlGaN/GaN designed according to the present invention and is divided into a left region, a middle region, and a right region. In the left region, a D-mode N-face AlGaN/GaN HEMT with polarity inversion and with gate dielectric layer M1 is formed. In the middle region, an SEG p-GaN gate and self-aligned gate metal E-mode N-face AlGaN/GaN HEMT with polarity inversion M2 is formed. This SEG p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion M2 includes a p-GaN inverted trapezoidal gate structure 26. In addition, although the 2DEG is formed at the junction i-Al_(x)GaN/i-GaN of the i-GaN channel layer 15, due to the existence of the p-GaN inverted trapezoidal gate structure 26, the 2DEG below the p-GaN inverted trapezoidal gate structure 26 in the i-GaN channel layer 15 will be depleted, giving a depletion region 262 without 2DEG. In the right region, a D-mode N-face AlGaN/GaN HEMT with polarity inversion and without gate dielectric layer M3 is formed.

The process steps as shown in FIG. 28A to FIG. 28F according to Embodiment 17 are identical to those according to Embodiment 9. The only difference is that between the steps of FIG. 28C and FIG. 28D, a step is added for fabricating the gate dielectric layer of the D-mode N-face AlGaN/GaN HEMT with polarity inversion and with gate dielectric layer M1 in the left region.

Embodiment 18: As Shown in FIG. 41A and FIG. 41B, a Hybrid E-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion Formed by the SEG p-GaN Gate and Self-Aligned Gate Metal E-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion Using a D-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion and with Gate Dielectric Layer as the Gate Protection Device Cascoding to a D-Mode N-Face AlGaN/GaN HEMT with Polarity Inversion and with Gate Dielectric Layer

As shown in FIG. 41A and FIG. 41B, the hybrid E-mode N-face AlGaN/GaN HEMT with polarity inversion according to Embodiment 18 comprises the epitaxial structure of N-face AlGaN/GaN designed according to the present invention and is divided into a left region, a middle region, and a right region. In the left region, a D-mode N-face AlGaN/GaN HEMT with polarity inversion and with gate dielectric layer M1 is formed. In the middle region, an SEG p-GaN gate and self-aligned gate metal E-mode N-face AlGaN/GaN HEMT with polarity inversion M2 is formed. This SEG p-GaN gate E-mode N-face AlGaN/GaN HEMT with polarity inversion M2 includes a p-GaN inverted trapezoidal gate structure 26. In addition, although the 2DEG is formed at the junction i-Al_(x)GaN/i-GaN of the i-GaN channel layer 15, due to the existence of the p-GaN inverted trapezoidal gate structure 26, the 2DEG below the p-GaN inverted trapezoidal gate structure 26 in the i-GaN channel layer 15 will be depleted, giving a depletion region 262 without 2DEG. In the right region, a D-mode N-face AlGaN/GaN HEMT with polarity inversion and with gate dielectric layer M3 is formed.

The process steps as shown in FIG. 28A to FIG. 28K according to Embodiment 18 are identical to those according to Embodiment 9. The only difference is that between the steps of FIG. 28D and FIG. 28G, a step is added for fabricating the gate dielectric layer of the D-mode N-face AlGaN/GaN HEMT with polarity inversion and with gate dielectric layer M1 in the left region and the gate dielectric layer of the D-mode N-face AlGaN/GaN HEMT with polarity inversion and with gate dielectric layer M3 in the right region. 

1. An epitaxial structure of enhancement-mode (E-mode) N-face AlGaN/GaN high electron mobility transistor (HEMT) with polarity inversion, comprising: an epitaxial structure of N-face AlGaN/GaN; and an etched p-GaN gate structure, located on said epitaxial structure of N-face AlGaN/GaN, the two-dimensional electron gas (2DEG) below said etched p-GaN gate structure being depleted; where said epitaxial structure of N-face AlGaN/GaN includes: a silicon substrate; a buffer layer (C-doped), located on the silicon substrate; an i-GaN (C-doped) layer, located on the buffer layer (C-doped); an i-Al_(y)GaN buffer layer, located on the i-GaN (C-doped) layer; an i-GaN channel layer, located on the i-Al_(y)GaN buffer layer, said 2DEG formed in said i-GaN channel layer; and an i-Al_(x)GaN layer, located on the i-GaN channel layer, where x=0.1˜0.3 and y=0.05˜0.75, and the N-face of said i-Al_(x)GaN layer moving the 2DEG located below said i-GaN channel layer to the top of said i-GaN channel layer by polarity inversion.
 2. The epitaxial structure of E-mode N-face AlGaN/GaN HEMT with polarity inversion of claim 1, wherein an i-Al_(z)GaN grading buffer layer is added between said i-GaN (C-doped) layer and said i-Al_(y)GaN buffer layer, where z=0.01˜0.75.
 3. An epitaxial structure of hybrid E-mode AlGaN/GaN HEMT, comprising: an epitaxial structure of N-face AlGaN/GaN, divided into a first region and a second region; a first depletion-mode (D-mode) N-face AlGaN/GaN HEMT with polarity inversion, located in said first region; and a p-GaN E-mode N-face AlGaN/GaN HEMT with polarity inversion, located in said second region, including a p-GaN inverted trapezoidal gate structure, the 2DEG below said p-GaN inverted trapezoidal gate structure being depleted, said p-GaN inverted trapezoidal gate structure connected electrically to said first D-mode N-face AlGaN/GaN HEMT with polarity inversion, the Vgs of said p-GaN E-mode N-face AlGaN/GaN HEMT with polarity inversion being 5˜10V when said first D-mode N-face AlGaN/GaN HEMT with polarity inversion is in saturation; where said epitaxial structure of N-face AlGaN/GaN includes: a silicon substrate; a buffer layer (C-doped), located on the silicon substrate; an i-GaN (C-doped) layer, located on the buffer layer (C-doped); an i-Al_(y)GaN buffer layer, located on the i-GaN (C-doped) layer; an i-GaN channel layer, located on the i-Al_(y)GaN buffer layer, said 2DEG formed in said i-GaN channel layer; and an i-Al_(x)GaN layer, located on the i-GaN channel layer, where x=0.1˜0.3 and y=0.05˜0.75, and the N-face of said i-Al_(x)GaN layer moving the 2DEG located below said i-GaN channel layer to the top of said i-GaN channel layer by polarity inversion.
 4. The epitaxial structure of hybrid E-mode AlGaN/GaN HEMT of claim 3, wherein an i-Al_(z)GaN grading buffer layer is added between said i-GaN (C-doped) layer and said i-Al_(y)GaN buffer layer, where z=0.01˜0.75.
 5. The epitaxial structure of hybrid E-mode AlGaN/GaN HEMT of claim 3, wherein a source and a gate of said first D-mode N-face AlGaN/GaN HEMT with polarity inversion are connected electrically to the gate of said p-GaN E-mode N-face AlGaN/GaN HEMT with polarity inversion.
 6. The epitaxial structure of hybrid E-mode AlGaN/GaN HEMT of claim 3, wherein said first D-mode N-face AlGaN/GaN HEMT with polarity inversion further includes a gate dielectric layer disposed below the gate of said first D-mode N-face AlGaN/GaN HEMT with polarity inversion.
 7. The epitaxial structure of hybrid E-mode AlGaN/GaN HEMT of claim 3, and further comprising a gate metal layer disposed on said p-GaN inverted trapezoidal gate structure.
 8. The epitaxial structure of hybrid E-mode AlGaN/GaN HEMT of claim 3, wherein said first D-mode N-face AlGaN/GaN HEMT with polarity inversion further includes a gate field-plate dielectric layer.
 9. The epitaxial structure of hybrid E-mode AlGaN/GaN HEMT of claim 3, wherein said first D-mode N-face AlGaN/GaN HEMT with polarity inversion further includes: a first source metal layer and a first drain metal layer, located on said i-Al_(x)GaN layer; and a first source ion implantation region and a first drain ion implantation region, located in said i-Al_(x)GaN layer, said first source ion implantation region located below said first source metal layer, and said first drain ion implantation region located below said first drain metal layer.
 10. The epitaxial structure of hybrid E-mode AlGaN/GaN HEMT of claim 3, wherein said p-GaN E-mode N-face AlGaN/GaN HEMT with polarity inversion further includes: a second source metal layer and a second drain metal layer, located on said i-Al_(x)GaN layer; and a second source ion implantation region and a second drain ion implantation region, located in said i-Al_(x)GaN layer, said second source ion implantation region located below said second source metal layer, and said second drain ion implantation region located below said second drain metal layer.
 11. The epitaxial structure of hybrid E-mode AlGaN/GaN HEMT of claim 3, and further comprising a second D-mode N-face AlGaN/GaN HEMT with polarity inversion, located in a third region of said epitaxial structure of N-face AlGaN/GaN, a source of said second D-mode N-face AlGaN/GaN HEMT with polarity inversion connected electrically to the drain of said p-GaN E-mode N-face AlGaN/GaN HEMT with polarity inversion, and a source of said p-GaN E-mode N-face AlGaN/GaN HEMT with polarity inversion connected electrically to the gate of said second D-mode N-face AlGaN/GaN HEMT with polarity inversion.
 12. The epitaxial structure of hybrid E-mode AlGaN/GaN HEMT of claim 11, wherein a gate dielectric layer is further disposed below the gate of said second D-mode N-face AlGaN/GaN HEMT with polarity inversion.
 13. The epitaxial structure of hybrid E-mode AlGaN/GaN HEMT of claim 11, wherein a gate field-plate dielectric layer is further disposed on the gate of said second D-mode N-face AlGaN/GaN HEMT with polarity inversion.
 14. The epitaxial structure of hybrid E-mode AlGaN/GaN HEMT of claim 11, wherein said second D-mode N-face AlGaN/GaN HEMT with polarity inversion further includes: a third source metal layer and a third drain metal layer, located on said i-Al_(x)GaN layer; and a third source ion implantation region and a third drain ion implantation region, located in said i-Al_(x)GaN layer, said third source ion implantation region located below said third source metal layer, and said third drain ion implantation region located below said third drain metal layer.
 15. An epitaxial structure of hybrid E-mode AlGaN/GaN HEMT, comprising: an epitaxial structure of N-face AlGaN/GaN, divided into a first region and a second region; a first depletion-mode (D-mode) N-face AlGaN/GaN HEMT with polarity inversion, located in said first region; and a p-GaN E-mode N-face AlGaN/GaN HEMT with polarity inversion, located in said second region, including an etched p-GaN gate structure, the 2DEG below said etched p-GaN gate structure being depleted, said etched p-GaN gate structure connected electrically to said first D-mode N-face AlGaN/GaN HEMT with polarity inversion, the Vgs of said p-GaN E-mode N-face AlGaN/GaN HEMT with polarity inversion being 5˜10V when said first D-mode N-face AlGaN/GaN HEMT with polarity inversion is in saturation; where said epitaxial structure of N-face AlGaN/GaN includes: a silicon substrate; a buffer layer (C-doped), located on the silicon substrate; an i-GaN (C-doped) layer, located on the buffer layer (C-doped); an i-Al_(y)GaN buffer layer, located on the i-GaN (C-doped) layer; an i-GaN channel layer, located on the i-Al_(y)GaN buffer layer, said 2DEG formed in said i-GaN channel layer; and an i-Al_(x)GaN layer, located on the i-GaN channel layer, where x=0.1˜0.3 and y=0.05˜0.75, and the N-face of said i-Al_(x)GaN layer moving the 2DEG located below said i-GaN channel layer to the top of said i-GaN channel layer by polarity inversion.
 16. The epitaxial structure of hybrid E-mode AlGaN/GaN HEMT of claim 15, wherein an i-Al_(z)GaN grading buffer layer is added between said i-GaN (C-doped) layer and said i-Al_(y)GaN buffer layer, where z=0.01˜0.75.
 17. The epitaxial structure of hybrid E-mode AlGaN/GaN HEMT of claim 15, wherein a source and a gate of said first D-mode N-face AlGaN/GaN HEMT with polarity inversion are connected electrically to the gate of said p-GaN E-mode N-face AlGaN/GaN HEMT with polarity inversion.
 18. The epitaxial structure of hybrid E-mode AlGaN/GaN HEMT of claim 15, wherein said first D-mode N-face AlGaN/GaN HEMT with polarity inversion further includes a gate field-plate dielectric layer.
 19. The epitaxial structure of hybrid E-mode AlGaN/GaN HEMT of claim 15, wherein said first D-mode N-face AlGaN/GaN HEMT with polarity inversion further includes a gate dielectric layer disposed below the gate of said first D-mode N-face AlGaN/GaN HEMT with polarity inversion.
 20. The epitaxial structure of hybrid E-mode AlGaN/GaN HEMT of claim 15, and further comprising a second D-mode N-face AlGaN/GaN HEMT with polarity inversion, located in a third region of said epitaxial structure of N-face AlGaN/GaN, a source of said second D-mode N-face AlGaN/GaN HEMT with polarity inversion connected electrically to the drain of said p-GaN E-mode N-face AlGaN/GaN HEMT with polarity inversion, and a source of said p-GaN E-mode N-face AlGaN/GaN HEMT with polarity inversion connected electrically to a gate of said second D-mode N-face AlGaN/GaN HEMT with polarity inversion.
 21. The epitaxial structure of hybrid E-mode AlGaN/GaN HEMT of claim 20, wherein a gate dielectric layer is further disposed below the gate of said second D-mode N-face AlGaN/GaN HEMT with polarity inversion.
 22. The epitaxial structure of hybrid E-mode AlGaN/GaN HEMT of claim 20, wherein a gate field-plate dielectric layer is further disposed on the gate of said second D-mode N-face AlGaN/GaN HEMT with polarity inversion. 